Lithographically defined optic array
AssigneeIntel Corporation
InventorVenkatesan Murali
Life of this patent
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Abstract
A two-dimensional lithographically defined optic array to transmit light through a substrates and aid alignment of multiple substrates. The 2-D lithographically defined optic array tan be made up of transparent material filled vias. Additionally, markers can be placed on the substrates relative to either the vias or the optical centers of the transparent material in the vias to aid alignment between multiple substrates containing 2-D lithographically defined optic arrays. Transparent materials such as optical fiber, cladding, and gas may be used in the 2-D optic array to provide a pathway for light. Optionally, a conductive layer may be deposited on a substrate with a 2-D optic array. The conductive layer can then interact with the 2-D optic array through light detecting devices such as photodetectors.
Claims23
An optic array comprising:
- a substrate with a plurality of holes;
- at least two optical fibers each embedded in separate ones of said holes;
- and
- a lithographically defined marker disposed on said substrate relative to said separate ones of said holes.
A method of making an optic array comprising:
- forming a plurality of holes in a substrate;
- heating said substrate;
- inserting at least two optical fibers each into a separate one of said holes;
- and
- placing a lithographically defined marker on said substrate relative to said separate said holes.
A method of making a multi-hip module with an optic array comprising:
- etching a hole in a first substrate;
- heating said first substrate;
- inserting an optical fiber into said substrate hole;
- placing a first marker on said first substrate;
- placing a second marker on a second substrate;
- lithographically aligning said first marker with said second marker;
- and
- attaching said first substrate to said second substrate.
Dependencies are inferred from the claim text.