Temperature control of micro-mirrors of an optical switch substrate
AssigneeTellium, Inc.
InventorsDavid R. Peale, Walter Framski, Lih Lin
Life of this patent
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Abstract
A temperature control system is provided for an optical switch including steerable micro-mirrors. The system includes at least one sensor and associated sensing circuitry for measuring the temperature of a micro-mirror or a region of a substrate near a micro-mirror. The system also includes a controller that responds to a signal provided by the sensing circuitry. The controller response may include activating heating or cooling devices the region that is sensed to adjust the temperature of the region.
Claims29
A temperature control system for one or more micro-mirrors of an optical device, comprising:
- a temperature sensor located adjacent a micro-mirror of an optical device, wherein the temperature sensor senses the temperature near the micro-mirror and generates a temperature signal indicative of the sensed temperature;
- a thermal element located adjacent the micro-mirror and that adjusts the temperature near the micro-mirror;
- and
- a temperature controller that compares the temperature signal to a signal indicative of a desired temperature and generates control signals based on the comparison for controlling the thermal element to adjust the temperature adjacent the micro-mirror until the temperature near the micro-mirror corresponds to the desired temperature.
An optical switching substrate comprising:
- a substrate;
- a plurality of micro-mirrors formed on the substrate and tiltable relative to the substrate about first and second axes;
- a temperature sensor located on the substrate adjacent at least one of the micro-mirrors, wherein the temperature sensor senses the temperature near the at least one micro-mirror and generates a temperature signal indicative of the sensed temperature;
- a thermal element located on the substrate and in thermal contact with the at least one micro-mirror and that adjusts the temperature near the at least one micro-mirror;
- and
- a temperature controller that receives the temperature signal and generates control signals for controlling the thermal element to adjust the temperature adjacent the micro-mirror until the temperature near the micro-mirror corresponds to a desired temperature.
An optical switch for selectively coupling optical signals on plurality of optical inputs to selected optical outputs, comprising:
- a switching substrate;
- a plurality of micro-mirrors formed on the substrate and tiltable relative to the substrate about first and second axes, wherein said micro-mirrors reflect the optical signals in optical paths between the optical inputs and optical outputs;
- a temperature sensor located on the substrate adjacent at least one of the micro-mirrors, wherein the temperature sensor senses the temperature near the at least one micro-mirror and generates a temperature signal indicative of the sensed temperature;
- a thermal element located on the substrate adjacent the at least one micro-mirror and that adjusts the temperature near the at least one micro-mirror;
- and
- a temperature controller that receives the temperature signal and generates control signals for controlling the thermal element to adjust the temperature adjacent the micro-mirror until the temperature near the micro-mirror corresponds to a desired temperature.
Dependencies are inferred from the claim text.