Electro-absorption typed optical modulator

Abstract

An improved electro-absorption semiconductor modulator using an external modulation, in which a multi-quantum well (MQW) structure for absorbing a light beam is provided to increase an optical absorption capability according to an electric field, thus increasing an optical power difference between ON and OFF states. Accordingly, the electro-absorption semiconductor modulator includes a semiconductor substrate; a lower cladding layer deposited over the semiconductor substrate; a multi-quantum well (MQW) layer comprised of barrier layers and undoped well layers stacked, in succession, predetermined times on the lower cladding layer, the barrier layers being doped with an impurity; an upper cladding layer deposited over the multi-quantum well layer; and, an ohmic contact layer deposited over the upper cladding layer. The impurity comprises an n-type dopant such as silicon and has a doping density of 1017/cm3.

Dependencies are inferred from the claim text.