Apparatus for inspecting a printed circuit board
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsSatoshi Nishida, Masanori Mizuno, Miki Kurosawa, Shozui Takeno, Masaharu Moriyasu
Life of this patent
Estimating the term…
Abstract
As a scanning device for positioning the irradiation position of the laser beam emitted from a laser oscillator at a position of arbitrary coordinates in the commanded mutually orthogonal X-axis direction and Y-axis direction, two galvanomirrors having mutually orthogonal rotary axes and a scan lens are provided, and the light generated from a printed circuit board irradiated with laser beam is detected by a detector, and approval or rejection of inspection result at each position of coordinates is judged on the basis of the output signal of the detector.
Claims21
An apparatus for inspecting a printed circuit board onto which at least one of a stop hole or a groove is processed, the apparatus comprising:
- a laser oscillator;
- a scanning device including:
- two scanning optical systems scanning within mutually orthogonal planes, and
- a scan lens,
- wherein the scanning device positions an irradiation portion of a laser beam emitted from said laser oscillator to a position of arbitrary coordinates in an X-axis direction and a Y-axis direction orthogonal to said X-axis direction;
- a detector for detecting a light generated from the printed circuit board irradiated with the laser beam;
- and
- a controller storing a position of coordinates of the at least one of the stop hole or the groove in the printed circuit board, and controlling said scanning device to direct the irradiation position of the laser beam to a position corresponding to the stored position of coordinates.
Dependencies are inferred from the claim text.