Method for inspection of an analyzed surface and surface scanning analyzer

A surface scanning analyzer comprising:

• (i) a rotary table for mounting thereon and rotating an object with an analyzed surface about a first axis of revolution that is perpendicular to the analyzed surface;
• (ii) a light source for illuminating the analyzed surface by a light spot at an angle close to the normal to the analyzed surface;
• (iii) a collecting mirror in the form of a truncated body of revolution formed by revolving a second order curve about a second axis of revolution which is parallel to the first axis of revolution and substantially coincides with the normal to the analyzed surface erected at the incidence point of said light spot, said incidence point being at the focus of said truncated body of revolution, a first section plane of the truncated body of revolution being located perpendicularly to the second axis of revolution in the immediate proximity to said focus, and a second section plane being parallel to the first section plane;
• (iv) a first light sensing unit for sensing the light mirror-reflected from the analyzed surface, said first light sensing unit being located close to the light source;
• (v) a second light sensing unit for sensing the light scattered from the analyzed surface and reflected from the collecting mirror;
• (vi) a flat mirror having an aperture at the center, arranged at an angle to the second axis of revolution and intended for passing therethrough the light from the light source to the analyzed surface and the light mirror-reflected from the analyzed surface to the first light sensing unit and for reflecting the light from the collecting mirror to the second light sensing unit;
• wherein
• the light source, collecting mirror, flat mirror with the aperture, and first and second light sensing units are accommodated in a housing rotatable about a third axis of revolution which is parallel to the first axis of revolution and passes outside the object with the analyzed surface and/or the rotary table;
• the light source being mounted so as said light spot having an elongated form on the analyzed surface is aligned, at least in one predetermined position of the housing, with its maximum size along a radius extending from the center of rotation of the analyzed surface.