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AssigneeAdvanced Energy Industries, Inc.
InventorsGeoffrey N. Drummond, George McDonough, Richard A. Scholl, Tim Kerr, John G. Harpold
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An improved system of igniting a plasma using a rapid voltage rise and thus causing ions that may be pre-existing to create secondary electron emission or the like is provided. In one embodiment, the voltage rise can be timed to be comparable to the transit time of the electrons across the plasma. It can also be arranged to achieve a voltage rise in less than 1000 microseconds, to result in a transition time that is less than one hundred times the transit time, to maximize the emission of secondary electrons, or even to merely result in collision energies ranging from 5 to 500 electron volts. The transition time can be controlled through an ignition control that may be programmable, may involve charging output storage devices, or may involve delayed switching to supply the increased voltage to the plasma after the storage elements have been more fully charged.
A plasma processing system comprising
A plasma processing system comprising:
A plasma processing system comprising:
A method of plasma processing, comprising the steps of
A method of plasma processing, comprising the steps of
A method of plasma processing, comprising the steps of
Dependencies are inferred from the claim text.