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AssigneeDaikin Industries, Ltd.
InventorsHiroyuki Tanaka, Masanori Hasegawa, Tsuyoshi Noguchi
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The metal oxide filler of titanium oxide or silicon oxide for the crosslinkable elastomer composition which has a pH value of from 5.0 to 11.0 and contains impurity metals other than the essential metal of the filler in an amount of not more than 10,000 ppm. The metal oxide filler can be obtained by extraction treatment of a starting metal oxide filler with an acid to reduce a content of impurity metals thereof and then treatment with an alkali to neutralize a remaining acid. The metal oxide filler of the present invention does not cause a crosslinking failure even when added to the elastomer composition and can provide the elastomer molded article suitable as a very clean sealing material for semi-conductor production apparatuses.
A process for preparing a metal oxide filler for a crosslinkable elastomer composition containing impurity metals other than essential metal of the filler in an amount of not more than 10,000 ppm, wherein a starting metal oxide filler is subjected to extraction treatment with an acid to reduce a content of impurity metals thereof and then treated with an alkali selected from the group consisting of an aqueous ammonia, basic amine and ammonia gas to neutralize a remaining acid.
A crosslinkable elastomer composition comprising a metal oxide filler containing impurity metals other than essential metal of the filler in an amount of not more than 10,000 ppm and a crosslinkable elastomer component.
Dependencies are inferred from the claim text.