Composition for preparing substances having nano-pores
AssigneeSamsung Electronics Co., Ltd.
InventorsJin Heong Yim, Yi Yeol Lyu, Sang Kook Mah, Eun Ju Nah, Il Sun Hwang, Keun Byoung Yoon
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Abstract
The present invention provides a composition for preparing substances having nano-pores, said composition comprising cyclodextrin derivative, thermo-stable organic or inorganic matrix precursor, and solvent for dissolving said two solid components. There is also provided an interlayer insulating film having evenly distributed nano-pores with a diameter less than 50 Å, which is required for semiconductor devices.
Claims16
A composition for preparing substances having nano-pores, said composition comprising:
- cyclodextrin derivative;
- thermo-stable organic or inorganic matrix precursor;
- and
- solvent for dissolving both the cyclodextrin derivative and the matrix precursor
- wherein the matrix precursor is siloxane-based resin which is prepared by hydrolysis and polycondensation of one or more monomers selected from the group consisting of compounds represented by the following formulas (1) to (5) in an organic solvent in the presence of a catalyst and water:
- RSiX1X2X3 (5)
- in which, R is hydrogen atom, C1˜3 alkyl group, C3˜10 cycloalkyl group, or C6-15 aryl group;
- X1, X2 and X3 are independently C1˜3 alkyl group, C1˜10 alkoxy group, or halogen atom;
- p is an integer ranging from 3 to 8;
- m is an integer ranging from 1 to 10;
- and n is an integer ranging from 1 to 12.
The composition according to 10, wherein the solvent is anisole, mesitylene, xylene, methyl isobutyl ketone, 1-methyl-2-pyrrolidinone, acetone, tetrahydrofuran, isopropyl ether, ethyl acetate, butyl acetate, propylene glycol methyl ether acetate, dimethylacetamide, dimethylformamide, γ-butyolactone, isopropyl alcohol, butyl alcohol, octyl alcohol, silicon solvents, or mixtures thereof.
Dependencies are inferred from the claim text.