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US 6,632,714 B2Granted
Method for manufacturing semiconductor memory
AssigneeKabushiki Kaisha Toshiba
InventorKuniyoshi Yoshikawa
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Abstract
The present invention discloses the new structure with regard to a nonvolatile semiconductor memory which can store therein an information corresponding to a plurality of bits. The nonvolatile semiconductor memory according to the present invention has a charge trapping layer 4 for accumulating electrons, in an end of a gate electrode. In the nonvolatile semiconductor memory according to the present invention, the electrons are stored in this charge trapping layer 4 to thereby store the information corresponding to the plurality of bits.
Claims26
A method for manufacturing a nonvolatile semiconductor memory comprising the steps of:
- forming a gate insulation film on a main surface of a semiconductor substrate;
- delineating a first gate electrode on the a gate insulation film;
- selectively forming a charge trapping layer at a side of the first gate electrode;
- delineating a second gate electrode electrically isolated from the first gate electrode on a side face of the charge trapping layer so that the charge trapping layer is sandwiched in between the first and second gate electrodes;
- and
- forming a conductive layer on the first gate electrode and the second gate electrode so that the first and second gate electrodes are electrically connected.
3 more elements
A method for manufacturing a nonvolatile semiconductor memory comprising the steps of:
- sequentially forming first, second and third insulation films on a main surface of a semiconductor substrate, and forming a gate insulation film composed of the first, second and third insulation films;
- depositing a gate electrode configuration material on an upper portion of the gate insulation film, and then patterning the gate electrode configuration material and the gate insulation film, and accordingly forming a gate electrode;
- selectively removing an end of said second insulation film, and accordingly forming a space;
- and
- forming a charge trapping layer in the space.
2 more elements
A method for manufacturing a semiconductor memory comprising the steps of:
- forming a first insulation film on a part of a main surface of a semiconductor substrate;
- sequentially forming second and third insulation films on an upper portion of the first insulation film and another part of the main surface of said semiconductor substrate;
- depositing a gate electrode configuration material on an upper portion of the third insulation film;
- forming a first gate electrode by patterning the gate electrode configuration material, said third insulation film, said second insulation film and said first insulation film;
- forming a second gate electrode by patterning said gate electrode configuration material, said third insulation film and said second insulation film;
- selectively removing ends of the second insulation films on both the first and second gate electrodes, and forming a space;
- and
- forming a charge trapping layer in the space.
5 more elements
A method for manufacturing a semiconductor memory comprising the steps of:
- sequentially forming first, second and third insulation films on a main surface of a semiconductor substrate;
- depositing a first gate electrode configuration material on an upper portion of the third insulation film, and then patterning the gate electrode configuration material, said third insulation film, said second insulation film and said first insulation film, and accordingly forming a first gate electrode;
- forming a second gate electrode formation area, on a part of the main surface of said semiconductor substrate, by removing said gate electrode configuration material, said third insulation film, said second insulation film and said first insulation film, simultaneously with the step of forming the first gate electrode;
- selectively removing an end of said second insulation film of the first gate electrode, and accordingly forming a space;
- forming an extremely thin insulation film on the main surface of said semiconductor substrate;
- depositing a material constituting a charge trapping layer on the main surface of said semiconductor substrate, and then anisotropically etching the charge trapping layer configuration material, and accordingly forming the charge trapping layer in the space of the first gate electrode;
- and
- depositing a fourth insulation film and a second gate electrode configuration material, on the main surface of said semiconductor substrate, and then patterning the second gate electrode configuration material, said fourth insulation film, said charge trapping layer configuration material and said extremely thin insulation film, and accordingly forming a second gate electrode.
5 more elements
A method for manufacturing a nonvolatile semiconductor memory comprising the steps of:
- forming a convex portion on a main surface of a semiconductor substrate;
- sequentially forming first, second and third insulation films on the main surface of said semiconductor substrate including the convex portion, and forming a gate insulation film composed of the first, second and third insulation films;
- depositing a gate electrode configuration material on an upper portion of the gate insulation film, and then patterning the gate electrode configuration material and the gate insulation film, and accordingly forming a gate electrode;
- selectively removing an end of said second insulation film, and forming a space;
- and
- forming a charge trapping layer in the space.
3 more elements
A method for manufacturing a nonvolatile semiconductor memory comprising the steps of:
- forming a convex portion on a main surface of a semiconductor substrate;
- sequentially forming a first insulation film, a charge trapping layer configuration material and a third insulation film on the main surface of said semiconductor substrate including the convex portion;
- and
- patterning the first insulation film, the charge trapping layer configuration material and the third insulation film, and accordingly forming a gate electrode.
1 more element
A method for manufacturing a nonvolatile semiconductor memory comprising the steps of:
- forming a concave portion on a main surface of a semiconductor substrate;
- sequentially forming first, second and third insulation films on the main surface of said semiconductor substrate including the concave portion, and forming a gate insulation film composed of the first, second and third insulation films;
- depositing a gate electrode configuration material on an upper portion of the gate insulation film, and then patterning the gate electrode configuration material and the gate insulation film, and accordingly forming a gate electrode;
- selectively removing an end of said second insulation film, and forming a space;
- and
- forming a charge trapping layer in the space.
3 more elements
A method for manufacturing a nonvolatile semiconductor memory comprising the steps of:
- forming a concave portion on a main surface of a semiconductor substrate;
- sequentially forming a first insulation film, a charge trapping layer configuration material and a third insulation film on the main surface of said semiconductor substrate including the concave portion;
- and
- patterning the first insulation film, the charge trapping layer configuration material and the third insulation film, and accordingly forming a gate electrode.
1 more element
A method for manufacturing a nonvolatile semiconductor memory comprising the steps of:
- forming a concave portion on a main surface of a semiconductor substrate;
- sequentially forming first, second and third insulation films on the main surface of said semiconductor substrate including the concave portion, and forming a gate insulation film composed of the first, second and third insulation films;
- depositing a gate electrode configuration material on an upper portion of the gate insulation film, and then removing the gate electrode configuration material by means of a chemically mechanically polishing method, and accordingly forming a gate electrode;
- selectively removing an end of said second insulation film, and forming a space;
- and
- forming a charge trapping layer in the space.
3 more elements
A method for manufacturing a nonvolatile semiconductor memory comprising the steps of:
- forming a concave portion on a main surface of a semiconductor substrate;
- sequentially forming a first insulation film, a charge trapping layer configuration material and a third insulation film on the main surface of said semiconductor substrate including the concave portion;
- and
- depositing a gate electrode configuration material on an upper portion of the third insulation film, and then removing the gate electrode configuration material by means of a chemically mechanically polishing method, and accordingly forming a gate electrode embedded in said concave portion.
1 more element
A method for manufacturing a nonvolatile semiconductor memory comprising the steps of:
- forming a gate insulation film on a main surface of a semiconductor substrate;
- delineating a first gate electrode on the a gate insulation film;
- selectively forming the charge trapping layers on both side faces of the first gate electrode;
- delineating second gate electrodes electrically isolated from the first gate electrode on side faces of the charge trapping layers so that the charge trapping layers are respectively sandwiched in between the first and second gate electrodes;
- and
- forming a conductive layer on the first gate electrode and the second gate electrodes so that the first gate electrode and the second gate electrodes are electrically connected.
3 more elements
Dependencies are inferred from the claim text.