Color image sensor and method for fabricating the same
AssigneeHyundai Electronics Industries Co., Ltd.
InventorsJae-Won Eom, Do-Young Lee, Kang-Jin Lee, Chan-Ki Kim, Ki-Nam Park
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AssigneeHyundai Electronics Industries Co., Ltd.
InventorsJae-Won Eom, Do-Young Lee, Kang-Jin Lee, Chan-Ki Kim, Ki-Nam Park
Estimating the term…
A method for fabricating a color image sensor for scanning and converting an optical image into electrical signals, includes the steps of: (a) forming a P-type semiconductor layer on a substrate; (b) forming field oxide layers on the P-type semiconductor layer to define regions for red, green and blue photodiodes; (c) providing an ion implantation mask having different mask patterns for the red, the green and the blue photodiodes; (d) implanting impurity ions into the P-type semiconductor layer through the use of said ion implantation mask to form N-type diffusion regions in the P-type semiconductor layer; and (e) applying a thermal process to the resulting structure to form different first, second and third depletion regions corresponding to the red, the green and the blue photodiodes.
A method for fabricating a color image sensor for scanning and converting an optical image into electrical signals, comprising the steps of:
Dependencies are inferred from the claim text.