Antireflection film
Assignee3M Innovative Properties Company
InventorsHyung Chul Choi, Edward P. Lindholm, William K. Smyth, Pradnya V. Nagarkar
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Abstract
An article includes an antireflection composite material, a substrate, and an inorganic layer deposited onto the substrate. The inorganic layer has a thickness of from about 1 nm to about 10 nm. The article includes a polymer layer in contact with the inorganic layer to form an outer surface of the antireflection composite material. The polymer layer has a thickness of from about 70 nm to about 120 nm.
Claims32
An article including an antireflection composite material, the article comprising:
- a substrate;
- an inorganic metal or metal oxide layer deposited onto the substrate and having a thickness of from about 1 nm to about 10 nm;
- and
- a polymer layer in contact with the inorganic layer to form an outer surface of the antireflection composite material, the polymer layer having a thickness of from about 70 nm to about 120 nm.
An article including an antireflection composite material, the article consisting essentially of:
- a substrate;
- an inorganic metal or metal oxide layer deposited onto the substrate and having a thickness of from about 1 nm to about 10 nm;
- and
- a polymer layer in contact with the inorganic layer to form an outer surface of the antireflection composite material, the polymer layer having a thickness of from about 70 nm to about 120 nm.
A method for providing an antireflection composite material on a substrate, the method comprising:
- depositing an inorganic antireflection composite material on the substrate to create an inorganic metal or metal oxide layer having a thickness of from about 1 nm to about 10 nm;
- depositing a layer of curable composition on the inorganic layer;
- and
- effecting a curing of the deposited curable composition to form a polymer layer having a thickness of from about 70 nm to about 120 nm.
A method for providing an antireflection composite material on a substrate, the method consisting essentially of:
- depositing an inorganic antireflection composite material on the substrate to form an inorganic metal or metal oxide layer having a thickness of from about 1 nm to about 10 nm;
- depositing a layer of curable composition on the inorganic layer;
- and
- effecting a curing of the deposited curable composition to form a polymer layer having a thickness of from about 70 nm to about 120 nm.
An antireflection composite material that may be deposited on a substrate, the antireflection composite material consisting essentially of:
- an inorganic metal or metal oxide layer having a thickness of from about 1 nm to about 10 nm;
- and
- a polymer layer formed by curing a curable composition in situ on the inorganic layer, the polymer layer having a thickness of from about 70 nm to about 120 nm.
Dependencies are inferred from the claim text.