Ion gun deposition and alignment for liquid-crystal applications
AssigneeInternational Business Machines Corporation
InventorsAlessandro Cesare Callegari, Praveen Chaudhari, James Patrick Doyle, Eileen Ann Galligan, Yoshimine Kato, James Andrew Lacey, Shui-Chih Alan Lien, Minhua Lu, Hiroki Nakano, Shuichi Odahara
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