Method of producing ferrite thin film
AssigneeMinebea Co., Ltd.
InventorsShoji Kaneko, Akio Takayama
Life of this patent
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Abstract
A raw material mixed solution containing nitrate or alkoxide of metal that constitutes a ferrite is sprayed from an atomizer by means of a carrier gas such as compressed air onto a substrate mounted on a hot plate and heated to a predetermined temperature. The method enables a thin film having a desired thickness to be formed by a simple apparatus in a short time without sacrificing good soft magnetism of a ferrite, thereby greatly contributing to downsizing and weight reduction of electronic devices.
Claims18
A method of producing a ferrite thin film, comprising intermittently spraying, by means of a carrier gas, a raw material mixed solution containing nitrate of a constituent metal of a ferrite onto a substrate preheated to a temperature between 350° C. and 500° C.
A method of producing a ferrite thin film, comprising spraying a raw material mixed solution containing alkoxide of a constituent metal of a ferrite onto a heated substrate by means of a carrier gas.
- 12.A method of producing a ferrite thin film according to claim 11, wherein a temperature of the substrate is 300 to 500° C.
Dependencies are inferred from the claim text.