Method for an optical switch on a silicon on insulator substrate

A method comprising:

• providing a silicon on insulator substrate;
• providing four metal suspension arms each comprising an internal stress gradient layer, each of said four metal suspension arms having a first end and a second end, said first end being attached to said silicon on insulator substrate;
• providing a silicon area having a reflective gold surface layer, said silicon area being attached to said second end of said four metal suspension arms;
• and
• providing four electrodes arranged on said silicon on insulator substrate adjacent to said four metal suspension arms, respectively, to create an electric field for producing deflective movement of said silicon area having said reflective gold surface layer.

A method comprising:

• providing a silicon on insulator substrate having a cutout portion;
• providing a plurality of metal suspension arms each comprising an internal stress gradient layer, each of said plurality of metal suspension arms having a first end and a second end, said first end being attached to said silicon on insulator substrate;
• providing a silicon area having a reflective surface layer and positioned over said cutout portion, said silicon area being attached to said second end of said plurality of metal suspension arms;
• and
• providing a plurality of electrodes arranged on said substrate adjacent to said plurality of metal suspension arms to create an electric field for producing deflective movement of said silicon area having said reflective surface layer.

A method performed on a substrate, comprising:

• producing an array of at least one mirror structure at a surface of the substrate, each mirror structure including:
• two or more suspension arms, each arm having an internal stress gradient, each arm further having an end attached to the substrate's surface, the arm extending away from the substrate's surface and extending to an attachment point;
• a reflective area supported on the attachment points of the suspension arms;
• and
• adjacent to each suspension arm, an electrode on the substrate's surface, the electrode being operable to create an electric field to attract the suspension arm toward the substrate's surface;
• the electrodes adjacent to the suspension arms of each mirror structure being operable to tilt the reflective area by attracting the suspension arms.

A method performed on a substrate structure, comprising:

• producing an array of at least one optical device on the substrate structure, go each optical device including:
• two or more suspension arms, each arm extending from a first end attached to the substrate structure to a second end separated from the substrate structure;
• each arm having an internal stress gradient moving the arm away from the substrate structure;
• an optical element supported on the second ends of the suspension arms;
• and
• for each suspension arm, an electrode on the substrate structure, the electrode responding to an actuation signal by attracting the suspension arm toward the substrate structure.

A method performed on a substrate structure, comprising:

• producing an array of optical devices on the substrate structure, each optical device including:
• two or more suspension arms, each arm having a length extending from a first end attached to the substrate structure to a second end that is not attached to the substrate structure;
• each arm being movable between a first position in which the arm's length has an initial separation from the substrate structure and a second position in which the arm's length is drawn toward the substrate structure, decreasing separation;
• each arm having an internal stress gradient moving the arm's length toward the first position;
• an optical element supported on the second ends of the suspension arms;
• and
• for each suspension arm, an electrode under the suspension arm, the electrode responding to an actuation signal by deflecting the suspension arm from its first position toward its second position;
• the electrodes responding individually to the actuation signals to tilt the optical element around two non-collinear axes.

A method performed on a silicon on insulator substrate structure, comprising:

• producing an array of mirror structures on the substrate structure, each mirror structure including:
• two or more metal suspension arms, each arm having a length extending from a first end attached to the substrate structure to a second end that is not attached to the substrate structure;
• each arm being movable between a first position in which the arm's length has an initial separation from the substrate structure and a second position in which the arm's length is drawn toward the substrate structure, decreasing separation;
• each arm having an Internal stress gradient moving the arm's length toward the first position;
• a mirror supported on the second ends of the suspension arms, the mirror including a silicon area and a reflective surface layer, and
• for each suspension arm, an electrode under the suspension arm, the electrode responding to an actuation signal by creating an electric field that deflects the suspension arm from its first position toward its second position by beginning to decrease separation at the arm's first end and proceeding to decrease separation along the length of the arm toward the arm's second end;
• the electrodes responding individually to the actuation signals to tilt the mirror around two non-collinear axes;
• the act of producing the array of mirror structures comprising:
• producing first, second, and third patterned layers over the substrate structure;
• the first patterned layer including the electrodes of the mirror structures;
• the second patterned layer being a metal layer over the first patterned layer and including the suspension arms of the mirror structures;
• the third patterned layer including the reflective surface layers of the mirrors;
• and
• releasing the mirror structures to allow the internal stress gradients of the metal suspension arms to move each suspension arm toward its first position.