Process for electrodepositing zinc oxide film
AssigneeCanon Kabushiki Kaisha
InventorsKozo Arao, Noboru Toyama, Yuichi Sonoda, Yusuke Miyamoto
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AssigneeCanon Kabushiki Kaisha
InventorsKozo Arao, Noboru Toyama, Yuichi Sonoda, Yusuke Miyamoto
Estimating the term…
The present process for electrodepositing a zinc oxide film comprises the steps of immersing a substrate and an opposing electrode in an electrodeposition bath which contains zinc nitrate and is kept heated, and forming the zinc oxide film on the substrate by passing a current between the substrate and the opposing electrode, wherein the process further includes a step of trapping the particles of zinc oxide precipitated in the electrodeposition bath by circulating or stirring the bath before the formation of the zinc oxide film, whereby the present process can prevent the generated zinc oxide powder from depositing on the surfaces of the substrate and the zinc oxide film formed by electrodeposition when restarting or starting the formation of a zinc oxide film by the electrodeposition using an electrodeposition apparatus, and hence the formation of a uniform zinc oxide film free from defects.
A process for electrodepositing a zinc oxide film, comprising the steps of:
A process for electrodepositing a zinc oxide film, comprising:
A process for electrodepositing a zinc oxide film, comprising:
Dependencies are inferred from the claim text.