Method and apparatus having pin electrode for surface treatment using capillary discharge plasma
AssigneePlasmion Corporation
InventorsSteven Kim, Seok-Kyun Song, Dong Woo Yu
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Abstract
A method and an apparatus for treating a workpiece using a plasma are disclosed in the present invention. In treating a workpiece using a plasma, the apparatus includes at least one pin electrode for receiving a power source, a dielectric body having first and second sides, wherein the first side is coupled to the pin electrode and the second side has at least one capillary extending to a direction of the first side of the dielectric body, and each capillary is substantially aligned with each pin electrode, and a counter electrode electrically coupled to the pin electrode for generating the plasma from each capillary.
Claims9
An apparatus for treating a workpiece using a plasma, comprising:
- at least one pin electrode for receiving a power source;
- a dielectric body having first and second sides, and at least one capillary partially extending from the first to the second side of the dielectric body, each capillary being substantially aligned with each pin electrode;
- a dielectric plate coupled to the dielectric body the capillary extending therethrough;
- and
- a counter electrode disposed between the dielectric body and the dielectric plate having at least one capillary extending therethrough and electrically coupled to the pin electrode for generating the plasma from each capillary.
Dependencies are inferred from the claim text.