Programmable flux gradient apparatus for co-deposition of materials onto a substrate

A method for forming one or more regions of a library on a substrate, the region of the library having a resulting material deposited in the region composed of two target materials, the method comprising:

• simultaneously emitting a first target material from a first target material source and a second target material from a second target material source towards the substrate;
• and
• independently blocking a first predetermined amount of the first target material and a second predetermined amount of the second target material directed towards predetermined positions on the substrate in order to form the resulting material having a first predetermined amount of the first target material and a second predetermined amount of second target material, the first and second target materials being simultaneously deposited onto the substrate to form a homogenous resulting material.

A method for simultaneously depositing gradients of two or more target materials onto a substrate, the method comprising:

• simultaneously emitting a first target material from a first target material source and a second target material from a second target material source towards the substrate;
• and
• blocking a first predetermined amount of the first target material and a second predetermined amount of the second target material directed towards the substrate in order to generate gradients of the first and second target materials on the substrate, the gradients of the first and second target materials being simultaneously deposited onto the substrate to form a resulting material.

A method for forming one or more regions of a library on a substrate, the region of the library having a resulting material deposited in the region composed of two target materials, the method comprising:

• simultaneously emitting a first target material from a first target material source and a second target material from a second target material source towards the substrate;
• and
• independently blocking a first predetermined amount of the first target material and a second predetermined amount of the second target material directed towards predetermined positions on the substrate in order to form the resulting material having a first predetermined amount of the first target material and a second predetermined amount of second target material, the first and second target materials being simultaneously deposited onto the substrate to form a resulting material.