US 6,632,284 B2Granted

Apparatus and method for forming deposited film

AssigneeCanon Kabushiki Kaisha

InventorsTakeshi Shishido, Masahiro Kanai, Yuzo Koda, Takahiro Yajima

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Abstract

A two-layer structured electric power application electrode including a non-split electrode consisting of a single planar plate and six split electrodes arranged on the non-split electrode so as to be electrically in contact with the non-split electrode is arranged on the upper side of a discharge chamber provided within a vacuum container such that the power application electrode faces a strip substrate in parallel. The split electrodes are arranged in such a manner as to form a planar plane, and the distance between the surfaces of the split electrodes facing the strip substrate and the strip substrate is uniform. The total area of the surfaces of the split electrodes facing the strip substrate is the same as the area of the non-split electrode on which the split electrodes are mounted.

Claims6

Dependent claims

An apparatus for forming a deposited film, comprising a vacuum container containing a pair of electrodes consisting of an electric power application electrode to which electric power is applied and a substrate on which a deposited film is to be formed, the deposited film being formed on the substrate by generating plasma between the substrate and the power application electrode to decompose a gas, as a raw material for forming the deposited film, introduced into the vacuum container,

wherein the power application electrode consists of a single planar electrode and a plurality of split electrodes electrically connected to the planar electrode, each of the split electrodes having an area smaller than an area of a plane of the planar electrode, and
wherein the plurality of split electrodes are arranged on a substrate-facing side of the planar electrode so as to form at least one substantially planar electrode layer having almost the same shape as the plane of the planar electrode.

Dependencies are inferred from the claim text.

Facts

Application: 09/767,856Filed 24 Jan 2001
Priority: JP 2000-02302231 Jan 2000
Published: US 2001/0022991 A120 Sep 2001
Granted: 14 Oct 2003
Term ends: Not estimatedThe source records don’t support an estimate.

Classification6 codes

H01J 37/32009
Gas-filled discharge tubes: arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
C23C 16/5096
Using internal electrodes: flat-bed apparatus
C23C 16/545
Apparatus specially adapted for continuous coating: for coating elongated substrates
H01J 37/32532
Constructional details of the reactor: electrodes