Back to results
US 6,632,129 B2Granted
Fixed abrasive article for use in modifying a semiconductor wafer
Assignee3M Innovative Properties Company
InventorDouglas P. Goetz
Life of this patent
Estimating the term…
Abstract
An abrasive article that includes a fixed abrasive element having a plurality of abrasive particles, a resilient element, and a plurality of rigid segments disposed between the fixed abrasive element and the resilient element.
Claims16
An abrasive article comprising:
- a) a fixed abrasive element comprising a plurality of abrasive particles;
- b) a resilient element;
- and
- c) a plurality of rigid segments disposed between said fixed abrasive element and said resilient element, wherein said rigid segments are attached to one another.
1 more element
An abrasive article comprising:
- a) a fixed abrasive element comprising a plurality of abrasive particles;
- b) a resilient element;
- and
- c) a plurality of rigid segments disposed between said fixed abrasive element and said resilient element, wherein said rigid segments extend from a common substrate and are at least partially defined by a plurality of intersecting grooves in said substrate.
1 more element
An abrasive article comprising:
- a) a fixed abrasive element comprising a plurality of abrasive particles;
- b) a resilient element;
- and
- c) a plurality of rigid segments disposed between said fixed abrasive element and said resilient element,
- wherein said fixed abrasive element extends continuously across a plurality of said rigid segments.
2 more elements
An abrasive article comprising:
- a) a fixed abrasive element comprising a plurality of abrasive particles;
- b) a resilient element;
- and
- c) a plurality of rigid segments disposed between said fixed abrasive element and said resilient element, wherein said rigid segments comprise a top surface, a side wall and a union disposed between the top surface and the side wall, said union being beveled.
1 more element
An abrasive article comprising:
- a) a fixed abrasive element comprising a plurality of abrasive particles;
- b) a resilient element;
- and
- c) a plurality of rigid segments disposed between said fixed abrasive element and said resilient element, wherein said rigid segments comprise a top surface, a side wall, and a union disposed between the top surface and side wall, said union being curved.
1 more element
An abrasive article comprising:
- a) a fixed abrasive element comprising a plurality of abrasive particles;
- b) a resilient element;
- and
- c) a plurality of rigid segments disposed between said fixed abrasive element and said resilient element, wherein said rigid segments are interdigitating.
1 more element
An abrasive article comprising:
- a) a fixed abrasive element comprising a plurality of abrasive particles;
- b) a resilient element;
- and
- c) a plurality of rigid segments disposed between said fixed abrasive element and said resilient element, wherein said rigid segments are selected from the group consisting of pyramidal, conical, cylindrical, frusto-conical, frusto-pyramidal, frusto-hemispherical, and other frusta.
1 more element
An abrasive article comprising:
- a) a fixed abrasive element comprising
- i) a backing;
- ii) a composition disposed on a first major surface of said backing, said composition comprising a binder and a plurality of abrasive particles;
- and
- b) a rigid element bonded to a second major surface of said backing, said rigid element comprising a plurality of rigid segments.
2 more elements
Dependencies are inferred from the claim text.