Method of manufacturing aluminum frames for photomask protective films
AssigneeGudeng Precision Industrial Co., Ltd.
InventorMing-Chien Chiu
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Abstract
A method of manufacturing aluminum frames for photomask protective films comprises the step of: providing a square-shaped hollow or solid strut aluminum material, fastening the bottom end of the aluminum material to a base of a machine tool, using a milling cutter to fabricate and form a hollow trough for a selected depth in the aluminum material from the top surface thereof, and using a cutting tool to cut off the aluminum material at the periphery of the hollow trough to form individual aluminum frames for the photomask protective films. The method of the invention uses fewer chucks and screw bolts during machining, and can reduce chuck setup time and simplify machining processes.
Claims10
A method of manufacturing aluminum frames for photomask protective films, which comprises the steps of:
- a) providing a strut of aluminum material having a bottom and a top;
- b) fastening the aluminum material to a base of a machine tool;
- c) fabricating and forming a hollow trough at a preselected depth in the aluminum material from the top thereof using a milling cutter;
- and,
- d) cutting the aluminum material at a periphery of the hollow trough to form a plurality of individual aluminum frames for a photomask protective films using a cutting tool.
Dependencies are inferred from the claim text.