Substrate handling robot with a batch loader and individual vacuum control at batch loader paddles

A robot for handling substrates disposed in a container providing a plurality of storage slots arranged vertically, the robot comprising:

• a multiple plane substrate holder, comprising:
• a first arm having a distal and a proximate end, the distal end being moveable in two horizontal dimensions;
• a first paddle having a proximate end and a distal end, the proximate end affixed to the distal end of the first arm;
• a second paddle having a proximate end and a distal end, the proximate end affixed to the proximate end of the first paddle, wherein the distal end of the first and second paddles are vertically spaced apart from one another;
• a third paddle having a proximate end and a distal end, the proximate end affixed to the proximate end of the second paddle, wherein the distal end of the second and third paddles are vertically spaced apart from one another;
• wherein the first, second, and third paddles are stacked in a vertical arrangement and wherein the distal ends of the first, second, and third paddles are configured and arranged for transporting multiple substrates to and from respective ones of said storage slots;
• an arm drive mechanism, connected to the first arm to operate the first arm, wherein the arm drive mechanism is configured and arranged to move the distal end of the first arm in two horizontal dimensions, wherein the distal ends of the first, second, and third paddles may be inserted into and removed from the container;
• a controller coupled to the arm drive mechanism, the controller configured and arranged to provide control signals to the arm drive mechanism to control arm movement;
• a vacuum control system;
• the vacuum control system connected to said multiple plane substrate holder and said controller, said vacuum control system including:
• a plurality of vacuum control valves, each controlling the vacuum from a vacuum source to an associated one of the first, second, and third paddles;
• and
• a plurality of vacuum sensors each connected to an associated one of the first, second, and third paddles, each vacuum sensor independently operative to provide a substrate-absent signal when a substrate is not present at the associated paddle, wherein each substrate-absent signal is independently processed by said controller, to generate an associated shut-valve signal that causes the associated vacuum control valve to shut and discontinue vacuum supply to the associated paddle.