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AssigneeTru-Si Technologies, Inc.
InventorsSean A. Casarotti, Alexander J. Berger, Frank E. Kretz
Estimating the term…
An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a supported wafer. In one example, the end-effector has a detector for detecting the presence of a wafer. The detector is mounted at a shallow angle to allow the end-effector to be positioned close to a wafer to be picked-up, thereby allowing detection of deformed wafers contained in a wafer cassette. The shallow angle of the detector also minimizes the thickness of the end-effector. Also disclosed is a wafer station with features similar to that of the end-effector.
An end-effector suitable for picking up a deformed flexible wafer, wherein the wafer is to be positioned on a first side of the end-effector, and the end-effector has a second side opposite to the first side, the end-effector comprising:
A method for picking up an object, the method comprising:
Dependencies are inferred from the claim text.