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US 6,631,638 B2Granted
Fluid flow sensor
AssigneeRosemount Aerospace Inc.
InventorsSteven D. James, William G. Kunik
Life of this patent
Estimating the term…
Abstract
A flow sensor for determining the velocity and direction of a fluid flow including a substrate, a heat source located on the substrate, and a first and a second heat sensor located on the substrate to detect at least a portion of heat generated by the heat source. The first and second heat sensors and the heat source are arranged in a non-linear orientation.
Claims56
A flow sensor for determining the speed of a fluid flow comprising:
- a die including a relatively thick substrate portion and a thin diaphragm portion;
- a heat source located on said diaphragm portion of said die;
- a first and a second heat sensor located on said diaphragm portion of said die to detect at least a portion of heat generated by said heat source, said first and second heat sensors and said heat source being arranged in a non-linear orientation;
- and
- a pressure sensor located on said die for determining the pressure of said fluid flow.
2 more elements
A flow sensor for determining the speed of a fluid flow over said flow sensor comprising:
- a die including a relatively thick substrate portion and a thin diaphragm portion;
- a heat source located on said diaphragm portion of said die;
- a first and a second heat sensor located on said diaphragm portion of said die to detect at least a portion of heat generated by said heat source, said first heat sensor and said heat source forming a first axis and said second heat sensor and said heat source forming a second axis, said first and said second axes being non-parallel;
- and
- a pressure sensor located on said die for determining the pressure of said fluid flow.
- 31.The flow sensor of claim 30 wherein said first axis is generally perpendicular to said second axis.
3 more elements
A flow sensor for determining the speed of a fluid flow over said flow sensor comprising:
- a die;
- a heat source located on said die, said heat source being connectable to a processor such that said processor can control the temperature of said heat source;
- a heat sensor located on said die to detect at least a portion of heat generated by said heat source, said heat source being connectable to said processor to provide an output to said processor;
- and
- a fluid temperature sensor located on said die for determining the upstream temperature of fluid which is substantially unheated by said heat source flowing over said die, said fluid temperature sensor being connectable to said processor to provide an output to said processor such that said processor can determine the speed of said fluid flow.
2 more elements
A flow sensor for determining the speed of a fluid flow over said flow sensor comprising:
- a die;
- a heat source located on said die, said heat source being connectable to a processor such that said processor can control the temperature of said heat source;
- a heat sensor located on said die to detect at least a portion of heat generated by said heat source, said heat sensor being connectable to said processor to provide an output to said processor;
- a pressure sensor located on said die for determining the pressure of said fluid flow;
- and
- a die temperature sensor located on said die for determining the temperature of said die;
- said die temperature sensor being connectable to said processor to provide an output to said processor such that said processor can determine the speed of said fluid flow.
4 more elements
A flow sensor for determining the speed of a fluid flow comprising:
- a die;
- a processor;
- and
- a first, second and third heat sensor located on said die, said first, second and third heat sensors being arranged in a non-linear orientation and coupled to said processor such that said processor can monitor and directly control the temperature of said first, second and third heat sensors by maintaining said first, second and third heat sensors at a generally constant temperature for a predetermined period of time and thereby determine the speed of said fluid flow.
1 more element
A method for determining the speed of a fluid flow comprising the steps of:
- providing a flow sensor comprising a die and a first and a second heat sensor located on said die;
- providing a processor;
- coupling said first and second heat sensors to said die such that an output of said first and second heat sensors is provided to said processor;
- causing a fluid to flow over said flow sensor;
- using said processor to maintain said first and second heat sensors at a generally constant temperature for a predetermined period of time as said fluid flows over said sensor;
- and
- monitoring said first and second heat sensors as said fluid flows over said sensor to determine said fluid speed.
4 more elements
A method for determining the speed of a fluid flow comprising the steps of:
- providing a flow sensor comprising a die, a heat source located on a diaphragm portion of said die, a first and a second heat sensor located on said diaphragm portion of said die, said first and second heat sensors and said heat source being located in a non-linear orientation, and a pressure sensor located on said die for determining the pressure of said fluid flow;
- providing a processor;
- coupling said heat source and said first and second heat sensors to said processor such that an output of said first and second heat sensors is provided to said processor;
- causing a fluid to flow over said flow sensor;
- causing said processor to control the heat output by said heat source and monitor said first and second heat sensors to determine said fluid speed;
- and
- monitoring the pressure measured by said pressure sensor to determine said fluid speed.
4 more elements
A flow sensor comprising:
- a die;
- a speed sensor located on said die, said speed sensor being connectable to a processor to provide an output such that said processor can determine the speed of said fluid flow;
- a pressure sensor located on said die, said pressure sensor being connectable to a processor to provide an output such that said processor can determine the pressure of said fluid flow;
- and
- a fluid temperature sensor located on said die, said fluid temperature sensor being connectable to said processor to provide an output such that said processor can determine the upstream temperature of said fluid which is substantially unheated by said heat source.
2 more elements
A flow sensor for determining the speed of a fluid flow comprising:
- a die;
- a heat source located on said die;
- a first and a second heat sensor located on said die to detect at least a portion of heat generated by said heat source, said first and second heat sensors and said heat source being arranged in a non-linear orientation;
- and
- a protective layer located on top of said heat source and said heat sensors.
2 more elements
A flow sensor for determining the speed of a fluid flow comprising:
- a die including a relatively thick substrate portion and a relatively thin diaphragm portion;
- a heat source located on said diaphragm portion of said die;
- a first and a second heat sensor located on said diaphragm portion of said die to detect at least a portion of heat generated by said heat source, said first and second heat sensors and said heat source being arranged in a non-linear orientation, wherein each heat sensor is located on an upper surface of said die to detect at least a portion of heat generated by said heat source as carried by said fluid flow;
- and
- a pressure sensor located on said die for determining the pressure of said fluid flow.
2 more elements
A flow sensor for determining the speed of a fluid flow over said flow sensor comprising:
- a die;
- a heat source located on said die, said heat source being connectable to a processor such that said processor can control the temperature of said heat source;
- a heat sensor located on said die to detect at least a portion of heat generated by said heat source, said heat sensor being connectable to said processor to provide an output to said processor;
- a pressure sensor located on said die for determining the pressure of said fluid flow, said pressure sensor including a pressure sensor diaphragm and a piezoelectric element located on said pressure sensor diaphragm such that said piezoelectric element can measure deflection of said pressure sensor diaphragm;
- and
- a die temperature sensor located on said die for determining the temperature of said die, said die temperature sensor being connectable to said processor to provide an output to said processor such that said processor can determine the speed of said fluid flow.
3 more elements
Dependencies are inferred from the claim text.