Vacuum pump
AssigneeSeiko Instruments Inc.
InventorAkira Yamauchi
Life of this patent
Estimating the term…
Abstract
To provide a vacuum pump that may heat a flow path of gas effectively with small electric power. A vacuum pump provided with an outer sleeve, a stator received in a hollow portion of the outer sleeve, a rotor received rotatably within the hollow portion of the outer sleeve for forming a flow path of gas in cooperation with the stator, a base to which the outer sleeve and the stator are to be fixed and supported, a heating electromagnet for generating heat by current supply and forming a magnetic field, a magnetic member forming a magnetic path of magnetic force by the heating electromagnet, and a heat radiation plate made of aluminum and fixed to the magnetic member.
Claims9
A vacuum pump comprising:
- an outer sleeve portion;
- a stator portion received in a hollow portion of the outer sleeve portion;
- a rotor portion received rotatably relative to the stator portion within the hollow portion of the outer sleeve portion for forming a flow path of gas in cooperation with the stator portion;
- a motor for rotating the rotor portion and for moving the gas within the flow path;
- a base portion having a discharge path for discharging the gas from the flow path to the outside, for supporting the stator portion;
- a heating electromagnet arranged in the vicinity of the discharge path;
- a magnetic member for forming a magnetic path of magnetic force by the heating electromagnet arranged in the vicinity of the discharge path;
- and
- a control means for controlling current supply to the heating electromagnet.
Dependencies are inferred from the claim text.