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US 6,629,627 B1Granted
Level control systems for high purity chemical delivery systems
AssigneeAdvanced Technology Materials, Inc.
InventorsStephen H. Siegele, Craig M. Noah, John N. Gregg
Life of this patent
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Abstract
A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.
Claims14
A canister for a chemical delivery system for high purity chemicals, comprising:
- a metallic container comprising an inlet and an outlet;
- an inlet pneumatic valve integral with said inlet;
- an outlet pneumatic valve integral with the outlet, wherein said pneumatic valve integral with said inlet and said pneumatic valve integral with the outlet are constructed and arranged for removable attachment of the container to a delivery manifold for dispensing high purity chemical material from the container through said pneumatic valves to the delivery manifold, wherein said pneumatic valve integral with said inlet and said pneumatic valve integral with the outlet are attached directly to the container without any manual valves, so that when the container is removed from the delivery manifold, the pneumatic valve integral with said inlet and the pneumatic valve integral with the outlet remain structurally integral with the container to isolate the interior volume of the container from the surrounding environment, and wherein said outlet pneumatic valve is coupled to a dip tube;
- and
- a level sensor disposed within the container.
2 more elements
Dependencies are inferred from the claim text.