Method and system for mounting semiconductor device, semiconductor device separating system, and method for fabricating IC card
AssigneeHitachi, Ltd.
InventorsHitoshi Odashima, Kazuyuki Futagi, Makoto Matsuoka, Toshimitsu Nakagawa
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Abstract
A semiconductor device mounting method and system and an IC card fabricating method which can fabricate high quality products by dicing a thin semiconductor wafer, in a state where it is adhered to an adhesive sheet, into thin semiconductor devices, peeling the group of diced thin semiconductor devices from the adhesive sheet at high speed without damaging or cracking the semiconductor devices, conveying the group of peeled semiconductor devices on a unit basis in serial order, and mounting them onto a mounting board.
Claims2
A semiconductor device separating apparatus for peeling off a group of semiconductor devices in a row, among semiconductor devices for an object obtained by dicing a semiconductor wafer adhered to a front face of an adhesive sheet, in such a manner that a member having a tip in a projecting or curved shape is pushed up against the back face of said adhesive sheet to thereby give tension to said adhesive sheet, and said member, while pushed up against the back face, is moved from one end to the other end of the adhesive sheet so as to peel off the group of semiconductor devices in the row, said device further comprising a pressure sensor for sensing the pressure pushing up against the back of the adhesive sheet.
Dependencies are inferred from the claim text.