Processor and temperature control method therefor

A method for controlling the temperature of an object to be processed, on a supporting table in a processing system, said system comprising a processing vessel including said supporting table having therein a refrigerant circulating passage, and a temperature control circuit for controlling a heat quantity and/or a flow rate of a refrigerant circulating in said refrigerant circulating passage,

• wherein a target differential value, and a relationship between said target differential value and a target return temperature of the refrigerant returning to said temperature control circuit are previously determined in accordance with a process in said processing system, said target differential value being a theoretical difference between inlet and outlet temperatures of the refrigerant in said refrigerant circulating passage,
• said inlet and outlet temperatures of the refrigerant in the refrigerant circulating passage are detected to determine an actual differential value that is a difference between said inlet and outlet temperatures, and
• the heat quantity and/or the flow rate of said refrigerant in said temperature control circuit is controlled so that said actual differential value follows said target differential value and that an actual return temperature of the refrigerant returning to said temperature control circuit follows said target return temperature to control the temperature of said object on said supporting table.

A method for controlling the temperature of an object to be processed, on a supporting table in a processing system, said system comprising a processing vessel including said supporting table having therein a refrigerant circulating passage, and a temperature control circuit for controlling a heat quantity and/or a flow rate of a refrigerant circulating in said refrigerant circulating passage,

• wherein a target differential value, and a relationship between said target differential value and a target feed temperature of the refrigerant being fed from said temperature control circuit are previously determined in accordance with a process in said processing system, said target differential value being a theoretical difference between inlet and outlet temperatures of the refrigerant in said refrigerant circulating passage,
• said inlet and outlet temperatures of the refrigerant in said refrigerant circulating passage are detected to determine an actual differential value that is a difference between said inlet and outlet temperatures, and
• the heat quantity and/or the flow rate of said refrigerant in said temperature control circuit is controlled so that said actual differential value follows said target differential value and that an actual feed temperature of the refrigerant being fed from said temperature control circuit follows said target feed temperature to control the temperature of said object on said supporting table.

A processing system comprising:

• a processing vessel for processing therein an object to be processed;
• a supporting table, provided in said processing vessel, for supporting thereon said object;
• a refrigerant circulating passage formed in said supporting table;
• and
• a temperature control circuit for controlling a heat quantity and/or a flow rate of a refrigerant circulating in said refrigerant circulating passage,
• said processing system further comprising:
• an inlet temperature detector for detecting an inlet temperature of the refrigerant in said refrigerant circulating passage;
• an outlet temperature detector for detecting an outlet temperature of the refrigerant in said refrigerant circulating passage;
• a return temperature detector for detecting a return temperature of the refrigerant returning to said temperature control circuit;
• and
• a controller for controlling said return temperature on the basis of an actual differential value by controlling the heat quantity and/or the flow rate by said temperature control circuit, said actual differential value being a difference between said inlet and outlet temperatures detected by said temperature detectors.

A processing system comprising:

• a processing vessel for processing therein an object to be processed;
• a supporting table, provided in said processing vessel, for supporting thereon said object;
• a refrigerant circulating passage formed in said supporting table;
• and
• a temperature control circuit for controlling a heat quantity and/or a flow rate of a refrigerant circulating in said refrigerant circulating passage,
• said processing system further comprising:
• an inlet temperature detector for detecting an inlet temperature of the refrigerant in said refrigerant circulating passage;
• an outlet temperature detector for detecting an outlet temperature of the refrigerant in said refrigerant circulating passage;
• a feed temperature detector for detecting a feed temperature of the refrigerant being fed from said temperature control circuit;
• and
• a controller for controlling said feed temperature on the basis of an actual differential value by controlling the heat quantity and/or the flow rate by said temperature control circuit, said actual differential value being a difference between said inlet and outlet temperatures detected by said temperature detectors.