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US 6,629,357 B1Granted
Method of magnetic head manufacture
AssigneeRead-Rite SMI Corporation
InventorShin-ichi Akoh
Life of this patent
Estimating the term…
Abstract
A magnetic head manufacturing method. In one embodiment, a wafer including magnetic head devices formed on the surface thereof are cut out into individual sliders. Photoresist is applied on the air bearing surfaces of the sliders and is then baked. The surface tension causes the photoresist at the peripheral regions of the air bearing surface to taper and become rounded or thinned. The air bearing surface is then uniformly dry-etched such that the peripheral regions of the air bearing surface are rounded in a tapered shape.
Claims3
A method of manufacturing a magnetic head, the method comprising:
- cutting out an individual slider from a wafer, wherein a magnetic head device is formed on a surface of the wafer;
- applying photoresist on an air bearing surface of the slider such that the photoresist is rounded and slopes downward in a curved shape toward a peripheral region of the air bearing surface;
- baking the photoresist;
- and
- uniformly dry etching the air bearing surface.
2 more elements
Dependencies are inferred from the claim text.