Optical inspection method and apparatus utilizing a collection angle design
AssigneeApplied Materials, Inc.
InventorsAmir Komem, Erel Milshtein
Life of this patent
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Abstract
Method and apparatus for optical inspection of a patterned article are presented. A region on the article is illuminated with incident light to produce light returned from the illuminated region. An image of the illuminated region is acquired and analyzed for determining the intensity distribution of light components scattered from the pattern of the illuminated region within a certain collection angular field located outside a solid angle of propagation of specularly reflected light. Based on the determined distribution, light components scattered from the illuminated region and propagating with at least one predetermined solid angle segment of the certain collection angle are collected and directed to a dark-field detection unit.
Claims21
A method for optical inspection of a patterned article, the method comprising the steps of:
- (i) illuminating a region on the article with incident light to produce light returned from the illuminated region;
- (ii) acquiring an image of the illuminating region, and generating data representative thereof,
- (iii) analyzing the generated data and determining intensity distribution of light components scattered from the pattern of the illuminated region within a certain collection angular field outside a solid angle of propagation of specularly reflected light;
- (iv) based on the determined distribution, filtering light collected with said certain collection angular field, so as to collect light components scattered from the illuminated region and propagating with at least one predetermined solid angle segment of said certain collection angular field, and to direct the collected light components to a detection unit.
A method for inspecting a patterned structure with a certain maximum solid angle of collection of light scattered from the article to be inspected, said certain maximum solid angle of collection lying outside a solid angle of propagation of light specularly reflected from said patterned structure, the method comprising the steps of:
- providing a database containing data representative of a plurality of solid angle segments of light propagation within said certain maximum solid angle of collection, said plurality of solid angle segments corresponding to a plurality of patterned structures including said patterned structure to be inspected, each of said solid angle segments corresponding to a direction of propagation of light components scattered from the corresponding patterned structure where the contribution of light scattered from the pattern is substantially minimal as compared to other solid angle segments of the solid angle of collection;
- selecting from said database the data representative of said patterned structure to be inspected, which data is to be used for filtering from the entire light collected with said certain maximum collection angle the light components propagating with the corresponding solid angle segment, and allowing the detection of said light components.
An optical inspection apparatus for inspecting a patterned article, the apparatus comprising:
- an illumination system for illuminating a region on the article;
- a light collection system collecting light components scattered from the illuminated region at a certain collection angular field located outside a solid angle of propagation of specularly reflected light components,
- a filter operable in the optical path of the collected, scattered light components such as to separate therefrom light components propagating with a predetermined solid angle segment of said certain collection angular field;
- a detection system comprising a detection unit for receiving a filtered part of the collected, scattered light and generating data representative thereof;
- and
- a control unit operating the filter in the optical path of the collected scattered light in accordance with predetermined data indicative of at least one solid angle segment of propagation of light scattered from the pattern in the illuminated region.
An optical inspection apparatus for inspecting a patterned article, the apparatus comprising:
- (a) an illumination system for illuminating a region on the article;
- (b) a light collection system comprising a first light collection arrangement collecting light components returned from the illuminated region, and a second light collecting arrangement collecting light components scattered from the illuminated region at a certain collection angular field located outside a solid angle of propagation of specularly reflected light components,
- (c) a filter selectively operable in the optical path of the collected, scattered light components for separating therefrom light components propagating with a predetermined solid angle segment of said certain collection angular field;
- (d) a detection system comprising a first detection unit that detects the light components collected by the first light collection arrangement and generates data representative thereof, and a second detection unit that detects a filtered part of the collected, scattered light and generates data representative thereof;
- and
- (e) a control unit, which is responsive to the data generated by the first detection unit for analyzing said data and operating the filter accordingly.
A control unit to be used in a system for optical inspection of a patterned structure with a certain maximum solid angle of collection of light scattered from the structure to be inspected, said certain maximum solid angle of collection lying outside a solid angle of propagation of light specularly reflected from the structure, the control unit comprising a memory that stores a database containing a plurality of data records corresponding to a plurality of patterned structures including said patterned structure to be inspected, wherein each data record contains data indicative of at least one solid angle segment of said certain maximum solid angle of collection corresponding to a direction of propagation of light components scattered from the corresponding patterned structure where the contribution of light scattered from the pattern is substantially minimal, as compared to other solid angle segments of the maximum solid angle of collection.
Dependencies are inferred from the claim text.