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US 6,627,965 B1Granted
Micromechanical device with an epitaxial layer
AssigneeBoston MicroSystems, Inc.
InventorsHarry L. Tuller, Richard Mlcak, Dharanipal Doppalapudi
Life of this patent
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Abstract
A micromechanical device includes a single crystal micromechanical structure where at least a portion of the micromechanical structure is capable of performing a mechanical motion. An epitaxial layer covers at least a portion of the micromechanical structure. In one embodiment, the micromechanical structure and the epitaxial layer are formed of different materials.
Claims24
A micromechanical device comprising:
- a single crystal micromachined micromechanical structure, at least a portion of the micromechanical structure capable of performing a mechanical motion;
- and
- an epitaxial layer covering at least a part of said portion of the micromechanical structure that is capable of performing a mechanical motion, the micromechanical structure and the epitaxial layer being formed of different materials, the epitaxial layer being formed of a material that provides at least one of protective, strength, frequency, damping, piezoelectric, pyroelectric, electro-optic, magno-resistive, variable reflectivity, chemically sensitive and biologically sensitive properties.
A micromechanical device comprising:
- a single crystal micromachined micromechanical structure, at least a portion of the micromechanical structure capable of performing a mechanical motion;
- and
- an epitaxial layer formed on at least a part of said portion of the micromechanical structure that is capable of performing a mechanical motion, the epitaxial layer being formed on the micromechanical structure after the micromechanical structure is micromachined, the micromechanical structure and the epitaxial layer being formed of different materials, the epitaxial layer being formed of a material that provides at least one of protective, strength, frequency, damping, piezoelectric, pyroelectric, electro-optic, magno-resistive, variable reflectivity, chemically sensitive and biologically sensitive properties.
Dependencies are inferred from the claim text.