Systems and methods for overcoming stiction using a lever
AssigneeNetwork Photonics, Inc.
InventorsBevan Staple, David Paul Anderson, Lilac Muller
Life of this patent
Estimating the term…
Abstract
A microstructure is provided including a base layer underlying a first and second structural plates. Operation of the microstructure is capable of overcoming stiction. Methods of operation include providing an edge of the first structural plate in contact with a contact point. A second structural plate is deflected in a way that overcomes stiction between the first structural plate and the contact point. Such deflection can include providing a prying force to lift the first structural plate or a hammering force to disturb any stiction related forces at the contact point.
Claims29
A method for overcoming a stiction force in an electro-mechanical device, wherein the stiction force is between a structural plate and a contact point, the method comprising:
- providing a base layer;
- providing a first pivot and a second pivot disposed on the base layer;
- providing a first structural plate supported by the first pivot and disposed above the base layer, wherein an edge of the first structural plate is in contact with the contact point;
- providing a second structural plate supported by the second pivot and disposed above the base layer;
- and
- deflecting the second structural plate to overcome a stiction force between the first structural plate and the contact point.
A method for overcoming a stiction force incident at a stop position in a MEMS device, the method comprising:
- providing a base layer;
- providing a first plate supported by a first pivot, wherein the first plate is disposed above the base layer and the first pivot is disposed on the base layer;
- providing a second plate supported by a second pivot, wherein the second plate is disposed above the base layer and the second pivot is disposed on the base layer;
- deflecting the first plate and deflecting the second plate to the stop position, wherein at the stop position, the second plate contacts the base layer or a structure thereon and the first plate contacts the second plate;
- and
- wherein the stiction force is overcome by a combination of a first restorative force between the first plate and the first pivot and a second restorative force between the second plate and the second pivot.
A method for overcoming a stiction force trapping a first plate in contact with a base layer or a structure thereon, the first plate included in a MEMS device, the method comprising:
- providing the base layer;
- providing a first actuator and a second actuator disposed on the base layer;
- providing the first plate supported by a first pivot, wherein the first plate is disposed above the first actuator and the first pivot is disposed on the base layer between the first actuator and the second actuator;
- providing a second plate supported by a second pivot, wherein the second plate is disposed above the second actuator and the second pivot is dispose on the base layer;
- activating the second actuator to cause the second plate to impact the first plate, wherein the impact reduces the stiction force.
An apparatus adapted for overcoming a stiction force, wherein the stiction force is between a structural plate and a contact point, the apparatus comprising:
- a base layer;
- a first pivot and a second pivot disposed on the base layer;
- a first structural plate supported by the first pivot and disposed above the base layer, wherein an edge of the first structural plate is in contact with the contact point;
- a second structural plate supported by the second pivot and disposed above the base layer;
- and
- wherein the second structural plate is movable to overcome a stiction force between the first structural plate and the contact point.
A MEMS device adapted for overcoming a stiction force incident at a stop position, the device comprising:
- a base layer;
- a first plate supported by a first pivot, wherein the first plate is disposed above the base layer and the first pivot is disposed on the base layer;
- a second plate supported by a second pivot, wherein the second plate is disposed above the base layer and the second pivot is disposed on the base layer;
- a first actuator for deflecting the first plate and a second actuator for deflecting the second plate, wherein the first actuator is electrically connected to the second actuator;
- and
- wherein energizing the first and second actuators causes the first plate to deflect away from the second plate and the second plate to deflect away from the first plate, thereby overcoming the stiction force.
Dependencies are inferred from the claim text.