Micromechanical memory element

A micromechanical memory element comprising:

• means for deflecting a deflectable member in one of two positions depending on a state of an input signal line;
• means for holding said deflectable member in said deflected state;
• and
• means for detecting said deflected state.

A micromechanical memory element comprising:

• a pass transistor;
• a first member biased at a first member voltage;
• a deflectable member receiving an electrical signal from said pass transistor, said deflectable member operable to deflect toward said first member when said electrical signal is a first state;
• and
• a first contact positioned to contact said deflectable member when said deflectable member is deflected toward said first member, said first contact providing a first contact voltage operable to hold said deflectable member in contact with said first contact in the absence of a signal from said pass transistor.

A method of forming a micromechanical memory element, the method comprising:

• providing a semiconductor substrate;
• forming addressing circuitry on said substrate;
• forming a first member and a first contact on said substrate, said first member and said first contact electrically connected to said addressing circuitry;
• forming a first sacrificial layer on said substrate;
• and
• forming a deflectable member on said first sacrificial layer, said deflectable member electrically connected to said substrate.