VUV laser beam characterization system

A beam characterization monitoring apparatus for receiving an input VUV beam and measuring a beam profile characteristic of the beam, comprising:

• an enclosure having an interior substantially free of VUV photoabsorbing species and configured for receiving the input VUV beam therein;
• a first detector coupled with the enclosure via a beam path substantially free of VUV photoabsorbing species for detecting a beam profile characteristic of the input VUV beam;
• and
• a quantum converter disposed along the beam path before the first detector for converting the VUV beam into a beam having a wavelength above 240 nm.

A beam characterization monitoring apparatus for receiving an input VUV beam and measuring a beam profile characteristic of the beam, comprising:

• an enclosure having an interior substantially free of VUV photoabsorbing species and configured for:
• receiving the input VUV beam therein;
• a first beam splitter for separating the input VUV beam into at least a first component for measuring a beam profile characteristic and a second component for measuring an energy characteristic of the input VUV beam;
• a first detector coupled with the enclosure via a beam path substantially free of VUV photoabsorbing species for detecting the first component;
• and
• a second detector coupled with the enclosure via a beam path substantially free of VUV photoabsorbing species for detecting the second component.

A beam characterization monitoring apparatus for receiving an input VUV beam and measuring a beam profile characteristic of the beam, comprising:

• an enclosure having an interior substantially free of VUV photoabsorbing species and configured for receiving the input VUV beam therein;
• at least a first detector coupled with the enclosure via a beam path substantially free of VUV photoabsorbing species for detecting a far field beam profile of the input VUV beam;
• and
• a focusing lens for focusing the far field beam profile of the VUV input beam to the detector for measuring a far field beam profile characteristic of the VUV input beam.