Method monitoring a quality of electronic circuits and its manufacturing condition and system for it
AssigneeHitachi, Ltd.
InventorsHirohito Okuda, Toshifumi Honda, Hisae Yamamura, Yuji Takagi, Hideaki Doi, Shigeshi Yoshinaga
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Abstract
With a view to providing a monitoring system for the quality and manufacturing conditions of electronic circuits capable of facilitating the grasping of correlation's between diverse manufacturing conditions and manufacturing states, statistically characteristic images are selected out of a group of images retrieved from a detection information database by specifying at least one out of the values of feature quantities, design information and manufacturing conditions, and are displayed.
Claims16
A monitoring system for electronic circuits, comprising:
- a database storing at least detected image data of prescribed positions of an electronic circuit formed on a substrate, and feature quantities of said prescribed positions calculated on the basis of these detected image data;
- a data display unit having a screen for inputting at least one selected retrieval condition and for displaying information stored in said database;
- and
- a statistical processor for executing statistical processing on a set of data extracted from said database according to the inputted retrieval condition;
- wherein said data display unit displays image data statistically processed by said statistical processor.
A monitoring system for electronic circuits, comprising:
- a database storage storing at least detected image data of semiconductor wafers, feature quantities of the manufacturing conditions of the semiconductor wafers calculated on the basis of these detected image data, feature quantities of defects on the semiconductor wafer calculated on the basis of detected defect image data, design information and manufacturing conditions;
- a data display unit having a screen for inputting at least one selected retrieval condition and for displaying information stored in said database storage;
- and
- a statistical processor for executing statistical processing on a set of data extracted from said database according to the inputted retrieval condition;
- wherein said data display unit displaying image data statistically processed by said statistical processor.
Dependencies are inferred from the claim text.