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US 6,621,097 B2Granted
Integrated semiconductor superlattice optical modulator
AssigneeIntel Corporation
InventorsDmitri E. Nikonov, Mario J. Paniccia
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Abstract
Apparatuses and methods for modulating an optical signal that include a superlattice structure. The superlattice structure is designed to convert the indirect bandgap structure of silicon into a direct bandgap structure to achieve more efficient optical absorption. The apparatus can be fabricated based on a structure of a circuit element by using standard fabrication processes for silicon integrated circuits such as metal oxide semiconductor processing.
Claims10
A method for modulating an optical beam, comprising:
- directing the optical beam through a back side of a semiconductor substrate of an integrated circuit die, the semiconductor substrate having a front side and the back side, the optical beam directed through a superlattice structure disposed in the semiconductor substrate, the superlattice structure having alternating layers formed of the semiconductor substrate and insulator layers;
- directing the optical beam back out the through the back side of the semiconductor substrate;
- and
- modulating a potential difference across the alternating layers of the superlattice structure in response to a signal on the integrated circuit die.
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An apparatus for modulating an optical beam, comprising:
- means for directing the optical beam through a back side of a semiconductor substrate of an integrated circuit die, the semiconductor substrate having a front side and the back side, the optical beam directed through a superlattice structure disposed in the semiconductor substrate, the superlattice structure having alternating layers formed of the semiconductor substrate and insulator layers;
- means for directing the optical beam back out the through the back side of the semiconductor substrate;
- and
- means for modulating a potential difference across the alternating layers of the superlattice structure in response to a signal on the integrated circuit die.
1 more element
Dependencies are inferred from the claim text.