Remote diagnostic system and method for semiconductor manufacturing equipment
AssigneeHitachi, Ltd.
InventorsKazue Takahashi, Nobuo Tsumaki, Hideyuki Yamamoto
Life of this patent
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Abstract
A remote diagnostic system for semiconductor manufacturing equipment which diagnoses user's semiconductor manufacturing equipment connected to a piece of diagnostic equipment which is provided by a third party through a communication network. The diagnostic equipment having at least one diagnostic program which diagnoses said semiconductor manufacturing equipment and a control section which starts the diagnostic program when accessed by a specific user terminal which has been given an access right, and the terminal sends data which is requested by the diagnostic equipment for diagnosis and receives a result of diagnosis from the diagnostic equipment.
Claims9
A remote diagnostic system for semiconductor manufacturing equipment which diagnoses a user's semiconductor manufacturing equipment connected together with a terminal to a piece of diagnostic equipment which is provided by a third party through a communication network;
- wherein the diagnostic equipment includes
- at least one diagnostic program which diagnoses the semiconductor manufacturing equipment, and
- a control section which starts at least one diagnostic program of the at least one diagnostic program when accessed by a specific user terminal given an access right;
- wherein a specific user terminal having an access right to use the diagnostic equipment given by a specific third party for a charge sends data which is requested by the diagnostic equipment for diagnosis and receives a result of diagnosis from the diagnostic equipment;
- and
- wherein the diagnostic equipment diagnoses the status of the semiconductor manufacturing equipment by
- determining standard operating conditions of the semiconductor manufacturing equipment,
- creating at least one database under the standard operating conditions,
- running the semiconductor manufacturing equipment under the standard operating conditions to obtain operating data,
- loading the diagnostic equipment with the operating data automatically or in response to an input from the specific user terminal, and
- comparing the operating data with contents of at least one database of the at least one database.
A remote diagnostic system for semiconductor manufacturing equipment which diagnoses semiconductor manufacturing equipment connected to a piece of diagnostic equipment which is provided by a third party through a communication network;
- wherein the diagnostic equipment includes
- a plurality of diagnostic programs which diagnose the semiconductor manufacturing equipment,
- a control section which starts at least one diagnostic program of the plurality of diagnostic programs when accessed by a specific user given an access right to use the diagnostic equipment by a specific third party for a charge, and
- a guidance section which displays information about the plurality of diagnostic programs;
- and
- wherein the diagnostic equipment diagnoses the status of the semiconductor manufacturing equipment by
- determining standard operating conditions of the semiconductor manufacturing equipment,
- creating at least one database under the standard operating conditions,
- running the semiconductor manufacturing equipment under the standard operating conditions to obtain operating data,
- loading the diagnostic equipment with the operating data automatically or in response an input from the specific user, and
- comparing the operating data with contents of at least one database of the at least one database.
Dependencies are inferred from the claim text.