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US 6,618,640 B1Granted
Method and apparatus for using integrated remote identifier
AssigneeAdvanced Micro Devices, Inc.
InventorsTodd Edward Hittner, Jason Alan Grover
Life of this patent
Estimating the term…
Abstract
The present invention provides for a method and an apparatus for using an integrated remote identifier for processing semiconductor wafers. Process data is associated with a remote identifier. A remote identifier interfacing process based upon the remote identifier is performed. A first processing run of semiconductor devices is performed in response to the remote identifier interfacing process.
Claims36
A method, comprising:
- correlating process data with a remote identifier capable of identifying one or more semiconductor devices;
- performing a remote identifier interfacing process based upon said remote identifier, said remote identifier interfacing process comprising determining at least one process control parameter for processing at least one of said semiconductor devices based upon said correlating of process data with said remote identifier;
- and
- performing a processing run of at least one of said semiconductor devices in response to said remote identifier interfacing process.
1 more element
A system, comprising:
- a computer system;
- an equipment interface coupled with said manufacturing model, said equipment interface being capable of reading a remote identifier capable of identifying one or more semiconductor devices and using data from the remote identifier to acquire process data corresponding to said one or more semiconductor devices;
- a processing tool capable of processing semiconductor wafers and coupled with said equipment interface, said first processing tool being capable of receiving at least one control input parameter signal from said equipment interface and performing a manufacturing process;
- and
- a metrology tool coupled with said processing tool, said metrology tool being capable of acquiring metrology data for generating modification data.
2 more elements
An apparatus, comprising:
- means for correlating process data with a remote identifier capable of identifying one or more semiconductor devices;
- means for performing a remote identifier interfacing process based upon said remote identifier, said remote identifier interfacing process comprising determining at least one process control parameter for processing at least one of said semiconductor devices based upon said correlating of process data with said remote identifier;
- and
- means for performing a processing run of at least one of said semiconductor devices in response to said remote identifier interfacing process.
1 more element
A computer readable program storage device encoded with instructions that, when executed by a computer, performs a method, comprising:
- correlating process data with a remote identifier capable of identifying one or more semiconductor devices;
- performing a remote identifier interfacing process based upon said remote identifier, said remote identifier interfacing process comprising determining at least one process control parameter for processing at least one of said semiconductor devices based upon said correlating of process data with said remote identifier;
- and
- performing a processing run of at least one of said semiconductor devices in response to said remote identifier interfacing process.
1 more element
Dependencies are inferred from the claim text.