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US 6,618,543 B1Granted
Optical devices made with vacuum-baked films
AssigneeSharp Kabushiki Kaisha
InventorsHideaki Fujita, Yorishige Ishii, Toshihiro Tamura, Yukio Kurata
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Abstract
A method for producing an optical device having a polyimide film through which a light beam is transmitted, which comprises applying a solution containing a polyamic film-forming starting material on a substrate and then baking the resultant under vacuum to form the polyimide film.
Claims10
An optical device having on a substrate an organic polymer film through which a light beam is transmitted,
- wherein the organic polymer film is formed to have a high transmittance, such that the film has an absorptivity coefficient of light of not more than 1.6 mm−1 in the wavelength of 650 nm said film being formed by applying a solution containing an organic polymer film-forming starting material on the substrate to form the applied film and then baking the applied film under a vacuum of 1 Torr or lower.
Dependencies are inferred from the claim text.