Tunable Fabry-Perot filter and method for fabricating the same
AssigneeElectronics and Telecommunications Research Institute
InventorsMyung-Hyun Lee, Yoo Hong Min, Jung Jin Ju, Seung Koo Park, Jung Yun Do
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Abstract
A tunable Fabry-Perot filter is provided with two optical fibers each being coated with a high-reflective thin film at its one end, a silicon block for aligning the two optical fibers with each other having a pair of V-shaped grooves formed at both ends thereof, respectively, a resonant cavity medium of silicon or polymeric material having a high coefficient of thermo-optic effect, and a thermal electrode for applying heat to the resonant cavity medium.
Claims7
A tunable Fabry-Perot filter comprising:
- two optical fibers each being coated with a high-reflective thin film at its one end;
- a means for aligning the two optical fibers with each other having a pair of V-shaped grooves formed at both ends thereof, respectively;
- a resonant cavity medium means of silicon or polymeric material having a high coefficient of thermo-optic effect;
- and
- a thermal electrode for applying heat to the resonant cavity medium means.
A tunable Fabry-Perot filter using a thermo-optic effect of silicon comprising:
- a silicon block having two V-shaped grooves formed at both ends, respectively;
- two optical fibers each being coated with a high-reflective thin film at its one end, the two optical fibers being arranged on the V-shaped grooves, respectively, with the high-reflective thin films facing each other, thereby being aligned with each other;
- a thermal electrode formed to apply heat to the thin film medium;
- and
- a thin-film resonant cavity medium made of the polymeric material formed on the silicon block between the V-shaped grooves.
A tunable Fabry-Perot filter using a thermo-optic effect of polymeric material comprising:
- a silicon block having a V-shaped groove extending between both ends;
- two optical fibers each being coated with a high-reflective thin film at its one end, the two optical fibers being arranged on the V-shaped groove with a predetermined magnitude of separation there between, in such a manner that the high-reflective thin films face each other, to be aligned with each other;
- a thin-film resonant cavity medium made of the polymeric material formed on the V-shaped groove between the high-reflective thin films;
- and
- a thermal electrode formed to apply heat to the thin film medium.
A method for fabricating a tunable Fabry-Perot filter, the method comprising the steps of:
- a) preparing a silicon block having a V-shaped groove extending between both ends;
- b) preparing two optical fibers each being coated with a high-reflective thin film at its one end;
- c) aligning the two optical fibers by inserting the two optical fibers into the V-shaped groove, with a predetermined magnitude of separation therebetween, while the high-reflective thin films facing each other;
- d) forming a thin-film resonant cavity medium with polymeric material on the V-shaped groove by pouring the polymeric material into the V-shaped groove between the high-reflective thin films;
- and
- e) fabricating a thermal electrode on the thin film medium after a planarization of an upper portion of the polymeric material.
Dependencies are inferred from the claim text.