Microelectromechanical optical cross-connect switches including row and column addressing and methods of operating same

An optical cross-connect switch comprising:

• a plurality of input optical paths;
• a plurality of output optical paths;
• an array of movable reflectors that are arranged in a plurality of rows of the movable reflectors and a plurality of columns of the movable reflectors and that selectively move between a first position that is outside the input optical paths and a second position along at least one of the input optical paths, each of the movable reflectors including a first movable electrode and a second movable electrode that are attached thereto;
• a plurality of row address lines, a respective one of which is electrically coupled to the first movable electrodes in a respective row of the movable reflectors;
• and
• a plurality of column address lines, a respective one of which is electrically coupled to the second movable electrodes in a respective column of the movable reflectors.

An electromechanical switch system comprising:

• a plurality of inputs;
• a plurality of outputs;
• an array of electromechanical switches that are arranged in a plurality of rows of the electromechanical switches and a plurality of columns of the electromechanical switches and that selectively move to couple the plurality of inputs to the plurality of outputs;
• a plurality of row address lines, a respective one of which is electromagnetically coupled to a respective row of the electromechanical switches;
• a plurality of column address lines, a respective one of which is electromagnetically coupled to a respective column of the electromechanical switches;
• and
• a substrate, wherein the plurality of inputs, the plurality of outputs, the array of electromechanical switches, the plurality of row address lines and the plurality of column address lines are on the substrate;
• wherein each of the electromechanical switches includes an electronic switch that is electrically coupled to the respective row and column line;
• and
• wherein the electronic switch comprises a transistor having a controlling electrode and a pair of controlled electrodes, wherein the controlling electrode is electrically connected to one of the respective row and column lines and wherein one of the controlled electrodes is electrically connected to the other of the respective row and column lines.

An electromechanical switch system comprising:

• a first plurality of electromechanical switches that selectively move to couple a plurality of inputs to a plurality of outputs;
• a second plurality of electromagnetic control lines that are less than the first plurality and that are selectively electromagnetically coupled to the first plurality of electromechanical switches to control the selective movement thereof;
• and
• a substrate, wherein the first plurality of electromechanical switches, the plurality of inputs, the plurality of outputs and the second plurality of electromagnetic control lines are on the substrate.

A method of operating an optical cross-connect switch that includes a plurality of input optical paths, a plurality of output optical paths, an array of movable reflectors that are arranged in a plurality of rows of the movable reflectors and a plurality of columns of the movable reflectors and that selectively move between a first position that is outside the input optical paths and a second position along at least one of the input optical paths, each of the movable reflectors including a first movable electrode and a second movable electrode that are attached thereto, a plurality of row address lines, a respective one of which is electrically coupled to the first movable electrodes in a respective row of the movable reflectors, a plurality of column address lines, a respective one of which is electrically coupled to the second movable electrodes in a respective column of the movable reflectors, a first clamp electrode that is adjacent the first position of the movable reflectors, a second clamp electrode that is adjacent the second position of the movable reflectors and a global magnetic actuator that applies a global magnetic actuation force to the array of movable reflectors that can move the reflectors from the first position toward the second position, the method comprising:

• applying a predetermined voltage to the first clamp electrode, a selected row address line and a selected column address line while simultaneously applying the global magnetic actuation force to the array to thereby cause the movable mirror that corresponds to the selected row address line and the selected column address line to move from the first position toward the second position.