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US 6,618,187 B2Granted
Blazed micro-mechanical light modulator and array thereof
AssigneeCreo IL. Ltd.
InventorNissim Pilossof
Life of this patent
Estimating the term…
Abstract
A light valve of deformable grating type and a method for light modulation using the light valves is provided. The light valve of deformable grating type, includes at least three beams, one beam of the at least three beams being of a substantially fixed-position, and at least two beams of the at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of the staircase creating a predefined change in the phase of an impinging light beam, a first electrode and a second electrode, the electrodes transmitting electrostatic force to at least the deformable beams of the at least three beams. The beam of a substantially fixed-position may be deformable by electrostatic force.
Claims30
A deformable grating light valve, comprising:
- at least three beams, one beam of said at least three beams being of a substantially fixed-position, and at least two beams of said at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of said staircase creating a predefined change in the phase of an impinging light beam;
- a first electrode and a second electrode, said first and second electrodes transmitting electrostatic force to at least two of said deformable beams of said at least three beams;
- and
- wherein said deformable beams form said first electrode and said second electrode comprises an array of electrodes, each electrode of said array of electrodes associated with one of said deformable beams.
1 more element
A deformable grating light valve, comprising:
- at least three beams, one beam of said at least three beams being of a substantially fixed-position, and at least two beams of said at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of said staircase creating a predefined change in the phase of an impinging light beam;
- a first electrode and a second electrode, said first and second electrodes transmitting electrostatic force to at least two of said deformable beams of said at least three beams;
- and
- wherein said beam of a substantially fixed-position is deformable by electrostatic force.
1 more element
A deformable grating light valve, comprising:
- at least three beams, one beam of said at least three beams being of a substantially fixed-position, and said at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of said staircase creating a predefined change in the phase of an impinging light beam;
- a first electrode and a second electrode, said first and second electrodes transmitting electrostatic force to at least two of said deformable beams of said at least three beams;
- and
- wherein said at least three beams form said first electrode and said second electrode is common to all said deformable beams.
1 more element
A method for light modulation, comprising the steps of:
- providing a deformable grating light valve, said light valve comprising at least three beams, at least the first beam of said at least three beams being of a substantially fixed-position, and at least two beams of said at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of said staircase creating a predefined change in the phase of an impinging light beam;
- wherein said deformable grating light valve additionally comprises a first electrode and a second electrode, said first and second electrodes transmitting electrostatic force to at least two of said deformable beams of said at least three beams;
- illuminating said light valve;
- applying voltage between said first electrode and said second electrode;
- and
- wherein said deformable beams form said first electrode, and said second electrode comprises an array of electrodes, each electrode of said array of electrodes associated with one of said deformable beams.
3 more elements
A method for light modulation, comprising the steps of:
- providing a deformable grating light valve, said light valve comprising at least three beams, at least the first beam of said at least three beams being of substantially fixed-position, and at least two beams of said at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of said staircase creating a predefined change in the phase of an impinging light beam, wherein said deformable grating light valve additionally comprises a first electrode and a second electrode, said first and second electrodes transmitting electrostatic force to at least two of said deformable beams of said at least three beams;
- illuminating said light valve;
- applying voltage between said first electrode and said second electrode;
- and
- wherein said first electrode comprises an array of electrodes, each electrode of said array of electrodes associated with one of said deformable beams, and said second electrode is common to all said deformable beams.
2 more elements
A method for light modulation, comprising the steps of:
- providing a deformable grating light valve, said light valve comprising at least three beams, at least the first beam of said at least three beams being of a substantially fixed-position, and said at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of said staircase creating a predefined change in the phase of an impinging light beam wherein said deformable grating light valve additionally comprises a first electrode and a second electrode, said first and second electrodes transmitting electrostatic force to at least two of said deformable beams of said at least three beams;
- illuminating said light valve;
- and applying voltage between said first electrode and said second electrode.
Dependencies are inferred from the claim text.