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US 6,618,184 B2Granted
Device for use with a micro-electro-mechanical system (MEMS) optical device and a method of manufacture therefor
AssigneesAgere Systems Inc., Lucent Technologies Inc.
InventorsSungho Jin, Hareesh Mavoori, Roland Ryf
Life of this patent
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Abstract
A device for use in a micro-electro-mechanical system (MEMS) optical system. The device includes a substrate having opposing first and second sides, wherein the first side has a light reflective optical layer located thereover, and the second side is an irregular surface.
Claims55
For use with a micro-electro-mechanical system (MEMS) optical device, a movable element comprising:
- a substrate having opposing first and second sides, wherein the first side has a light reflective optical layer located thereover and the second side is an irregular surface, wherein the irregular surface reduces interferrometric loss associated with the movable element.
A method of manufacturing a movable element for use in a micro-electro-mechanical system (MEMS) optical system, comprising:
- forming a substrate having opposing first and second sides, wherein the second side has an irregular surface that reduces interferrometric loss associated with the movable element;
- and
- forming a light reflective optical layer over the first side.
An optical communications system, comprising:
- input/output fiber bundles;
- a micro-electro-mechanical structure, comprising:
- a mirror including a substrate having opposing first and second sides, wherein the first side has a light reflective optical layer located thereover and the second side is an irregular surface that reduces interferrometric loss associated with the movable element;
- and
- a mounting substrate on which the mirror is movably mounted;
- imaging lenses interposed between the input/output fiber bundles and the micro-electro-mechanical structure;
- and
- a reflector.
5 more elements
Dependencies are inferred from the claim text.