In-line holographic mask for micromachining

An apparatus for patterning a workpiece comprising:

• a source of illumination, an in-line holographic mask, and a workpiece holder, wherein:
• said source of illumination provides illumination having an associated wavelength, said illumination for generating a reconstruction beam extending along an axis;
• said in-line holographic mask comprises a recording of wave interference from an object mask, wherein a portion of said recording is disposed on said axis between said source of illumination and said workpiece holder;
• and
• said workpiece holder is disposed for holding a portion of the workpiece on said axis wherein a portion of said reconstruction beam extending along said axis and illuminating said portion of said recording on said axis can form a real image on the workpiece.

A method of imparting an image to a workpiece comprising the steps of:

• a) forming an in-line holographic mask by:
• a1) providing an object mask, a recording medium, and a first source of illumination, said object mask having a first side, said recording medium having a first face, said recording medium further comprising a central region;
• a2) providing illumination from said first source of illumination to said first side to generate object waves incident on said first face;
• a3) using illumination from said first source of illumination to generate reference waves incident on said first face so as to interfere with said object waves incident on said first face, wherein said object mask does not shadow said central region of said recording medium from reference waves;
• a4) recording an interference pattern of said interfering waves in at least said central region of said recording medium;
• b) providing a second source of illumination for generating a reconstruction beam, said reconstruction beam having a reconstruction beam wavelength and reconstruction beam fluence;
• c) providing a workpiece;
• and
• d) illuminating said recording of said interference pattern with said reconstruction beam so as to impart a plurality of independent real images to the workpiece.

A method of imparting an image to a workpiece comprising the steps of:

• a) forming an in-line holographic mask by:
• a1) providing an object mask, a recording medium, and a first source of illumination, said object mask having a first side, said recording medium having a first face, said recording medium further comprising a central region;
• a2) providing illumination from said first source of illumination to said first side to generate object waves incident on said first face;
• a3) using illumination from said first source of illumination to generate reference waves incident on said first face so as to interfere with said object waves incident on said first face, wherein said object mask does not shadow said central region of said recording medium from reference waves;
• a4) recording an interference pattern of said interfering waves in at least said central region of said recording medium;
• b) providing a second source of illumination for generating a reconstruction beam, said reconstruction beam having a reconstruction beam wavelength and reconstruction beam fluence;
• c) providing a workpiece;
• and
• d) illuminating said recording of said interference pattern with said reconstruction beam so as to impart a real image to the workpiece, wherein said real image is directed to a material, wherein said real image is for simultaneously drilling multiple holes in the material.

A method of imparting an image to a workpiece comprising the steps of:

• a) forming an in-line holographic mask by:
• a1) providing an object mask, a recording medium, and a first source of illumination, said object mask having a first side, said recording medium having a first face, said recording medium further comprising a central region;
• a2) providing illumination from said first source of illumination to said first side to generate object waves incident on said first face;
• a3) using illumination from said first source of illumination to generate reference waves incident on said first face so as to interfere with said object waves incident on said first face, wherein said object mask does not shadow said central region of said recording medium from reference waves;
• a4) recording an interference pattern of said interfering waves in at least said central region of said recording medium;
• b) providing a second source of illumination for generating a reconstruction beam, said reconstruction beam having a reconstruction beam wavelength and reconstruction beam fluence;
• c) providing a workpiece;
• and
• d) illuminating said recording of said interference pattern with said reconstruction beam so as to impart a real image to the workpiece, wherein said real image is directed to a material, wherein said real image is for ablating the material in a pattern corresponding to said real image.

A method of imparting an image to a workpiece comprising the steps of:

• a) forming an in-line holographic mask by:
• a1) providing an object mask, a recording medium, and a first source of illumination, said object mask having a first side, said recording medium having a first face, said recording medium further comprising a central region;
• a2) providing illumination from said first source of illumination to said first side to generate object waves incident on said first face;
• a3) using illumination from said first source of illumination to generate reference waves incident on said first face so as to interfere with said object waves incident on said first face, wherein said object mask does not shadow said central region of said recording medium from reference waves;
• a4) recording an interference pattern of said interfering waves in at least said central region of said recording medium;
• b) providing a second source of illumination for generating a reconstruction beam, said reconstruction beam having a reconstruction beam wavelength and reconstruction beam fluence;
• c) providing a workpiece;
• and
• d) illuminating said recording of said interference pattern with said reconstruction beam so as to impart a real image to the workpiece, further comprising providing a lens for focusing said real image.

A method of imparting an image to a workpiece comprising the steps of:

• a) forming an in-line holographic mask by:
• a1) providing an object mask, a recording medium, and a first source of illumination, said object mask having a first side, said recording medium having a first face, said recording medium further comprising a central region;
• a2) providing illumination from said first source of illumination to said first side to generate object waves incident on said first face;
• a3) using illumination from said first source of illumination to generate reference waves incident on said first face so as to interfere with said object waves incident on said first face, wherein said object mask does not shadow said central region of said recording medium from reference waves;
• a4) recording an interference pattern of said interfering waves in at least said central region of said recording medium;
• b) providing a second source of illumination for generating a reconstruction beam, said reconstruction beam having a reconstruction beam wavelength and reconstruction beam fluence;
• c) providing a workpiece;
• and
• d) illuminating said recording of said interference pattern with said reconstruction beam so as to impart a real image to the workpiece, wherein said in-line holographic mask is made of a material that is substantially transparent and resistant to damage at said reconstruction beam wavelength and fluence, and wherein said in-line holographic mask is made using surface relief patterning of said material.

A method of imparting an image to a workpiece comprising the steps of:

• a) forming an in-line holographic mask by:
• a1) providing an object mask, a recording medium, and a first source of illumination, said object mask having a first side, said recording medium having a first face, said recording medium further comprising a central region;
• a2) providing illumination from said first source of illumination to said first side to generate object waves incident on said first face;
• a3) using illumination from said first source of illumination to generate reference waves incident on said first face so as to interfere with said object waves incident on said first face, wherein said object mask does not shadow said central region of said recording medium from reference waves;
• a4) recording an interference pattern of said interfering waves in at least said central region of said recording medium;
• b) providing a second source of illumination for generating a reconstruction beam, said reconstruction beam having a reconstruction beam wavelength and reconstruction beam fluence;
• c) providing a workpiece;
• and
• d) illuminating said recording of said interference pattern with said reconstruction beam so as to impart a real image to the workpiece, wherein said recording comprises a surface relief pattern.

A method of imparting an image to a workpiece comprising the steps of:

• a) forming an in-line holographic mask by:
• a1) providing an object mask, a recording medium, and a first source of illumination, said object mask having a first side, said recording medium having a first face, said recording medium further comprising a central region;
• a2) providing illumination from said first source of illumination to said first side to generate object waves incident on said first face;
• a3) using illumination from said first source of illumination to generate reference waves incident on said first face so as to interfere with said object waves incident on said first face, wherein said object mask does not shadow said central region of said recording medium from reference waves;
• a4) recording an interference pattern of said interfering waves in at least said central region of said recording medium;
• b) providing a second source of illumination for generating a reconstruction beam, said reconstruction beam having a reconstruction beam wavelength and reconstruction beam fluence;
• c) providing a workpiece;
• and
• d) illuminating said recording of said interference pattern with said reconstruction beam so as to impart a real image to the workpieces wherein the workpiece comprises a material for patterning with a three dimensional structure in a high aspect ratio.

A method of imparting an image to a workpiece comprising the steps of:

• a) forming an in-line holographic mask by:
• a1) providing an object mask, a recording medium, and a first source of illumination, said object mask having a first side, said recording medium having a first face, said recording medium further comprising a central region;
• a2) providing illumination from said first source of illumination to said first side to generate object waves incident on said first face;
• a3) using illumination from said first source of illumination to generate reference waves incident on said first face so as to interfere with said object waves incident on said first face, wherein said object mask does not shadow said central region of said recording medium from reference waves;
• a4) recording an interference pattern of said interfering waves in at least said central region of said recording medium;
• b) providing a second source of illumination for generating a reconstruction beam, said reconstruction beam having a reconstruction beam wavelength and reconstruction beam fluence;
• c) providing a workpiece;
• and
• d) illuminating said recording of said interference pattern with said reconstruction beam so as to impart a real image to the workpiece, wherein said real image comprises a high intensity region and wherein said high intensity region is for photoablation or for fabricating microcircuits.

A method of imparting an image to a workpiece comprising the steps of:

• a) forming an in-line holographic mask by:
• a1) providing an object mask, a recording medium, and a first source of illumination, said object mask having a first side, said recording medium having a first face, said recording medium further comprising a central region;
• a2) providing illumination from said first source of illumination to said first side to generate object waves incident on said first face;
• a3) using illumination from said first source of illumination to generate reference waves incident on said first face so as to interfere with said object waves incident on said first face, wherein said object mask does not shadow said central region of said recording medium from reference waves;
• a4) recording an interference pattern of said interfering waves in at least said central region of said recording medium;
• b) providing a second source of illumination for generating a reconstruction beam, said reconstruction beam having a reconstruction beam wavelength and reconstruction beam fluence;
• c) providing a workpiece;
• and
• d) illuminating said recording of said interference pattern with said reconstruction beam so as to impart a real image to the workpiece, wherein said in-line holographic mask is made of a material that is substantially transparent and resistant to damage at said reconstruction beam wavelength and fluence, and wherein said in-line holographic mask is made using surface relief patterning of said material.

A method of imparting an image to a workpiece comprising the steps of:

• a) forming an in-line holographic mask by:
• a1) providing an object mask, a recording medium, and a first source of illumination, said object mask having a first side, said recording medium having a first face, said recording medium further comprising a central region;
• a2) providing illumination from said first source of illumination to said first side to generate object waves incident on said first face, wherein light transmitted through said object mask provides said object waves incident on said first face;
• a3) using illumination from said first source of illumination to generate reference waves incident on said first face so as to interfere with said object waves incident on said first face, wherein said object mask does not shadow said central region of said recording medium from reference waves;
• a4) recording an interference pattern of said interfering waves in at least said central region of said recording medium;
• b) providing a second source of illumination for generating a reconstruction beam, said reconstruction beam having a reconstruction beam wavelength and reconstruction beam fluence;
• c) providing a workpiece;
• and
• d) illuminating said recording of said interference pattern with said reconstruction beam so as to impart a real image to the workpiece.