Laser beam inspection apparatus
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorIwao Ichikawa
Life of this patent
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Abstract
A laser beams inspection apparatus suitable for inspecting electronic components such as ICs mounted on a substrate. The inspection apparatus includes a scan mechanism. The scan mechanism works to move a laser beam emitted from a laser emitter to scan a target one of electronic components in a given scan range. The scan mechanism is designed to change orientation of emission of the laser beam to change the scan range as a function of the type (e.g., the size) of the target electronic component, thereby minimizing inspection errors regardless of the type of the electronic components to be inspected.
Claims17
An inspection apparatus comprising:
- a laser emitter emitting a laser beam for inspecting objects;
- a scan mechanism moving the laser beam emitted from said laser emitter to scan a target one of the objects in a given scan range, said scan mechanism being designed to change orientation of emission of the laser beam to change the scan range;
- and
- a laser receiver receiving a return of the laser beam from the target object to provide an object-inspected data, wherein
- said scan mechanism includes refracting members arranged adjacent each other along an optical path of the laser beam emitted from said laser emitter.
An inspection apparatus comprising:
- a laser emitter emitting a laser beam for inspecting objects;
- a scan mechanism subjecting the laser beam emitted from said laser emitter to circular motion to scan a target one of the objects in a circular scan range cyclically, said scan mechanism being designed to control orientation of emission of the laser beam to determine an area of the circular scan range as a function of the size of the target object;
- and
- a laser receiver receiving a return of the laser beam from the target object to provide an object-inspected data, wherein
- said scan mechanism includes refracting members arranged adjacent each other along an optical path of the laser beam emitted from said laser emitter.
An inspection apparatus comprising:
- a laser emitter emitting a laser beam for inspecting objects;
- a scan mechanism including refracting members disposed adjacent to each other along an optical path of the laser beam to change orientation of emission of the laser beam emitted from said laser emitter to perform rectilinear scanning about a target one of the objects, said scan mechanism being designed to change a relative angle between the refracting members to change orientation of the rectilinear scanning of the laser beam as a function of orientation of the target object;
- and
- a laser receiver receiving a return of the laser beam from the target object to provide an object-inspected data.
Dependencies are inferred from the claim text.