System and method for measuring the quality of an illumination field from a laser line illumination system

A method of analyzing a focused illumination field of a line of laser illumination, said method comprising the steps of:

• receiving the illumination field of the line of laser illumination at a first slit-shaped opening, said first slit-shaped opening being oriented in a direction that is generally transverse to the direction of the line of laser illumination;
• permitting a generally square shaped portion only of the illumination field to pass through the first slit-shaped opening;
• receiving the portion of the illumination field from the first opening at an outer circular wall of a rotating unit, said rotating unit including a second opening and being adapted to rotate with respect to a sensor;
• and
• rotating said unit such that the portion of the illumination field having a focal point within said rotating unit passes through the second opening reaching said sensor, and subsequently does not pass through the second opening as the rotating unit continues to rotate.

A method of analyzing a focused illumination field of a line of laser illumination, said method comprising the steps of:

• receiving the illumination field of the line of laser illumination at a first opening, said first opening permitting a portion only of the illumination field to pass through the first opening, said portion corresponding to a spot size in an illumination system;
• receiving the portion of the illumination field from the first opening at an outer wall of a moving unit, said moving unit including a second opening;
• moving said unit such that the portion of the illumination field passes through the second opening and is received at a sensor;
• moving said unit such that the portion of the illumination field is not passed through the second opening;
• determining the focal energy of the portion of the illumination field that is received at said sensor;
• and
• moving both said first opening and said second opening with respect to said illumination field such that another portion only of the illumination field to pass through the first opening.

A method of analyzing a focused illumination field of a line of laser illumination, said method comprising the steps of:

• receiving the illumination field of the line of laser illumination at an active region of a first opening, said first opening permitting a first portion only of the illumination field to pass through the first opening and said first portion passing through said first opening at said active region thereof;
• receiving the first portion of the illumination field from the active region of said first opening at an outer wall of a moving unit, said moving unit including a second opening;
• moving said unit such that the first portion of the illumination field passes through an active region of the second opening and is received at a sensor;
• moving said unit such that the first portion of the illumination field is not passed through the second opening;
• determining the focal energy of the portion of the illumination field that is received at said sensor;
• moving said first opening with respect to said illumination field such that a second portion of said illumination field is permitted to pass through the active region of the first opening;
• and
• moving said second opening with respect to said illumination field such that the second portion of the illumination field is permitted to pass through the active region of the second opening.