Movable support in a vacuum chamber and its application in lithographic projection apparatuses

A lithographic projection apparatus, comprising:

• an illumination system;
• a first object table arranged in an illumination path from said illumination system;
• a second object table arranged in an optical path from said first object table;
• a projection system arranged in said optical path between said first and second object tables;
• a vacuum chamber enclosing at least one of said first and second object tables;
• a support member extending in said vacuum chamber and supporting said at least one of said first and second object tables;
• and
• a cable arranged within said support member,
• wherein said cable is in communication with said at least one of said first and second object tables enclosed in said vacuum chamber from outside of said vacuum chamber.