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US 6,618,121 B2Granted
Stage apparatus capable of suppressing rolling of a vibration isolation table
AssigneeOlympus Optical Co., Ltd.
InventorNaobumi Okada
Life of this patent
Estimating the term…
Abstract
With a simple operation of inputting the target movement amount for the stage through the input device as input data, an acceleration signal is output from the control device to the acceleration/deceleration device based on the input data, and then n×T seconds after the acceleration signal is output, a deceleration signal having the same waveform as that of the acceleration signal and an opposite direction thereto is output.
Claims7
A stage apparatus including a stage mounted on a vibration isolation table, said stage apparatus comprising:
- a drive unit which accelerates or decelerates said stage;
- an input unit which accepts a start signal of acceleration/deceleration as input data without defining a target movement amount for said stage;
- and
- a control unit which outputs an acceleration signal to said drive unit based on the data input to said input unit, and which outputs a deceleration signal n×T seconds after said acceleration signal is output, wherein n represents a natural number and T represents a rolling oscillation period unique to the vibration isolation table (in seconds), and wherein the deceleration signal has a same waveform as said acceleration signal and an opposite direction to said acceleration signal.
1 more element
A stage apparatus including a stage mounted on a vibration isolation table, comprising:
- a drive unit which accelerates or decelerates said stage;
- an input unit which accepts a target movement speed for said stage as input data;
- and
- a control unit which outputs a first acceleration signal to said drive unit based on the input contents to said input unit and outputs, (n−0.5)×T seconds after the first acceleration signal is output (where n represents a natural number and T represents a rolling oscillation period unique to the vibration isolation table [in seconds]), a second acceleration signal having a same waveform as that of the first acceleration signal and a same direction thereto.
1 more element
Dependencies are inferred from the claim text.