Probing device and manufacturing method thereof, as well as testing apparatus and manufacturing method of semiconductor with use thereof

A testing apparatus for conducting a test on an object to be tested having a plurality of electrodes thereon, by transferring electric signals, comprising:

• a wiring sheet formed by aligning, on at least one surface of a flexible insulator sheet, a plurality of contact electrodes corresponding to each of said electrodes formed on the object to be tested, each of said contact electrodes being formed with a plurality of projecting contacting tips, said contacting tips being formed by etching a conductor film mounted on said flexible insulator sheet, said wiring sheet having extension wiring electrically connected to each of said contact electrodes and being covered with a protective film;
• positioning means which positions said object to be tested flatly with respect to said wiring sheet;
• means which applies contacting pressure to said wiring sheet to obtain electrical conduction between said extension wiring and said object to be tested whereby said plurality of projecting contacting tips of each of said contact electrodes contact and form an electrical connection with one electrode on said object to be tested;
• and
• a tester electrically connected with the extension wiring, whereby the electrical signals are transferred from said tester to said object to be tested so as to conduct the test.

A testing apparatus for conducting a test on an object to be tested having a plurality of electrodes thereon by transferring electrical signals, comprising:

• a wiring sheet formed by aligning, on at least one surface of a flexible insulator sheet, a plurality of contact electrodes corresponding to each of said electrodes on the object to be tested, each of said contact electrodes being formed with a plurality of projecting contacting tips, said contacting tips being formed by etching a conductor film mounted on said flexible insulator sheet, said wiring sheet having extension wiring electrically connected to each of said contact electrodes being formed from said conductor film, formed on either said one surface or an opposite surface of said insulator sheet;
• positioning means which positions said object to be tested flatly with respect to said wiring sheet;
• means which applies contacting pressure to said wiring sheet to obtain electrical conduction between said extension wiring and said object to be tested whereby said plurality of projecting contacting tips of each of said contact electrodes contact and form an electrical connection with one electrode on said object to be tested;
• and
• a tester electrically connected with the extension wiring, whereby the electrical signals are transferred from said tester to said object to be tested so as to conduct the test.

A testing apparatus for conducting a test on an object to be tested having a plurality of electrodes thereon by transferring electrical signals, comprising:

• a wiring sheet formed by aligning, on at least one surface of a flexible insulator sheet, a plurality of contact electrodes corresponding to each of said electrodes on the object to be tested, each of said contact electrodes being formed with a plurality of projecting contacting tips, said contacting tips being formed by etching a conductor film mounted on said flexible insulator sheet, a conductor plating film over said conductor film on said flexible insulator sheet, said wiring sheet having extension wiring electrically connected to each of said contact electrodes being formed from said conductor film, formed on either said one surface or an opposite surface of said flexible insulator sheet;
• positioning means which positions said object to be tested flatly with respect to said wiring sheet;
• and
• a tester electrically connected with the extension wiring, whereby the electrical signals are transferred from said tester to said object to be tested so as to conduct the test.

A testing apparatus comprising:

• a sample support portion for supporting an object to be tested having a plurality of electrodes thereon;
• at least one probe system, comprising:
• a wiring sheet formed by aligning, on at least one surface of a flexible insulator sheet, a plurality of contact electrodes corresponding to each of said electrodes on the object to be tested, each of said contact electrodes being formed with a plurality of projecting contacting tips, said contacting tips being formed by etching a conductor film mounted on said flexible insulator sheet, said wiring sheet having extension wiring electrically connected to each of said contact electrodes being formed from said conductor film, formed on either said one surface or an opposite surface of said flexible insulator sheet;
• means which applies contacting pressure to obtain electrical conduction between said extension wiring and said object to be tested whereby said plurality of projecting contacting tips on each of said contact electrodes contact and form an electrical connection with an electrode on said object to be tested;
• and
• a tester connected to said probe system for conducting the test.

A testing apparatus for conducting a test on an object to be tested having a plurality of electrodes thereon by transferring electric signals, comprising:

• a wiring sheet formed by aligning, on at least one surface of a flexible insulator sheet, a plurality of contact electrodes corresponding to each of said electrodes of said object to be tested, each of said contact electrodes being formed with a plurality of projecting contacting tips, said contacting tips being formed by etching a copper film mounted on said flexible insulator sheet, said wiring sheet having an extension wiring electrically connected to each said contact electrode;
• means which applies contacting pressure to obtain electrical conduction between said extension wiring and said object to be tested whereby said plurality of projecting contacting tips of each of said contact electrodes contact and form an electrical connection with an electrode on said object to be tested;
• and
• a tester electrically connected with said extension wiring.

A testing apparatus for conducting a test on an object to be tested having a plurality of electrodes thereon by transferring electric signals, comprising:

• a wiring sheet formed by aligning, on at least one surface of a flexible insulator sheet, a plurality of contact electrodes corresponding to each of said electrodes of said object to be tested, each of said contact electrodes being formed with a plurality of projecting contacting tips, said contacting tips being formed by shower etching a copper film mounted on said flexible insulator sheet, said wiring sheet having an extension wiring electrically connected to each said contact electrode;
• means which applies contacting pressure to obtain electrical conduction between said extension wiring and said object to be tested whereby said plurality of projecting contacting tips of each of said contact electrodes contact and form an electrical connection with an electrode on said object to be tested;
• and
• a tester electrically connected with said extension wiring.

A testing apparatus for conducting a test on an object to be tested having a plurality of electrodes thereon by transferring electric signals, comprising:

• a wiring sheet formed by aligning, on at least one surface of a flexible insulator sheet, a plurality of contact electrodes which make contact with electrodes of said object to be tested, each of said contact electrodes being formed with a plurality of projecting contacting tips, said contacting tips being formed by etching a conductor film mounted on said flexible insulator sheet, a conductor plating film over said conductor film on said flexible insulator sheet, said wiring sheet having an extension wiring electrically connected to each said contact electrode;
• means which applies contacting pressure to obtain electrical conduction between said extension wiring and said object to be tested whereby said plurality of projecting contacting tips of each of said contact electrodes contact and form an electrical connection with an electrode on said object to be tested;
• and
• a tester electrically connected with said extension wiring.