Contactor of the device for testing semiconductor device
AssigneeTechwing Co., Ltd.
InventorsKyung-Jo Min, Kyung-Tae Kim, Ung-Hyun Yoo
Life of this patent
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Abstract
The present invention discloses a contactor of the device for testing a semiconductor device comprising a fixed block receiving a test tray having a plurality of a semiconductor device, a base plate having a cylinder on one side of the base plate and installed in one side of the fixed block, a push plate moving forward and backward by the cylinder and installed between the base plate and the fixed block, a plurality of an air nozzle to be contacted to the test tray by a forward and backward movement of the push plate having the cylinder, and installed in the push plate and protruded to the test tray, and a providing means of blending air to guide and provide the blending air for the air nozzle.
Claims27
An apparatus for testing devices, comprising:
- a fixed block receiving a test tray having at least one device;
- a tester being positioned at a first side of said fixed block, said tester testing the at least one device when the test tray is received by said fixed block;
- a base plate being coupled to said fixed block and being positioned at a second side of said fixed block;
- a push plate being movably mounted on guide pins located between said base plate and the second side of said fixed block, said push plate being moved toward the test tray and away from the test tray along the guide pins;
- and
- at least one air nozzle being mounted on said push plate, said at least one air nozzle guiding air directly toward at least one selected from among the test tray and the at least one device when said push plate is moved toward the test tray, the air being guided to control an environment of the at least one device, said at least one air nozzle comprising:
- an outer tube being mounted to said push plate, said outer tube forming an opening facing toward the test tray, the air flowing through said outer tube;
- and
- a nozzle tube, said nozzle tube penetrating the opening formed by said outer tube, said nozzle tube being partly outside said outer tube and being partly inside said outer tube, the air flowing through said nozzle tube, said nozzle tube being supported by an elastic force pushing said nozzle tube away from said push plate.
An apparatus for testing devices, comprising:
- a fixed block receiving a test tray having a plurality of devices;
- a tester being positioned at a first side of said fixed block, said tester testing the devices when the test tray is received by said fixed block;
- a base plate being coupled to said fixed block and being located at a second side of said fixed block;
- a movable unit being mounted to said base plate and having a rod;
- a push plate being positioned between said fixed block and said base plate, said push plate being moved toward and away from said fixed block by the rod;
- an air providing unit providing air to the devices to control a temperature of the devices when said tester performs the testing of the devices;
- and
- a plurality of air nozzles being mounted on said push plate, said air nozzles guiding the air from said air providing unit to the devices, at least one of said air nozzles comprising:
- an outer tube being mounted to said push plate, said outer tube having a first end facing toward said fixed block and a second end facing toward said base plate;
- and
- a nozzle tube being movably installed at least partly inside said outer tube;
- when said push plate is moved away from the test tray and toward said base plate, and when said nozzle tube is not contacting the devices and is not contacting the test tray, said nozzle tube extending a first distance out from the first end of said outer tube;
- when said push plate is moved toward the test tray and away from said base plate, and when said nozzle tube is contacting at least one selected from among the test tray and at least one of the devices, said nozzle tube not extending the first distance out from the first end of said outer tube.
A method for testing devices, comprising:
- receiving a test tray into a fixed block, the test tray having at least one device;
- positioning a tester at a first side of the fixed block, the tester testing the at least one device when the test tray is received by the fixed block;
- moving a push plate toward a second side of the fixed block and away from the second side of the fixed block;
- and
- guiding gas directly toward at least one selected from among the test tray and the at least one device to control an environment of the at least one device, said guiding being performed by at least one air nozzle mounted on the push plate, the at least one air nozzle including a nozzle tube and including an outer tube mounted to the push plate, the outer tube forming an opening facing toward the test tray, the nozzle tube penetrating the opening formed by the outer tube and being partly inside the outer tube and partly outside the outer tube, the guided gas flowing through the inner and outer tubes, the nozzle tube being supported by an elastic force urging the nozzle tube away from the push plate.
Dependencies are inferred from the claim text.