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US 6,617,764 B2Granted
High temperature piezoelectric sensor
AssigneeUniversity of Dayton
InventorsJames R. Sebastian, David A. Stubbs, Rollie E. Dutton
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Abstract
The present invention provides a sensor that can be operated at high temperatures. The sensor comprises a first electrode, a second electrode, and an aluminum nitride film which lies between the first and second electrode. The sensor can be used to measure pressure, acceleration, or force at high temperatures.
Claims16
A high temperature piezoelectric sensor device comprising
- first and second electrodes;
- a first insulator having first and second surfaces;
- a pressure component engaging at least said first surface of said first insulator, wherein said second surface of said first insulator engages said first electrode, and said pressure component is coupled to said second electrode;
- a second insulator extending substantially perpendicular from said second electrode;
- and
- a piezoelectric film separating said first and said second electrode, wherein said piezoelectric film is deposited using chemical vapor deposition, wherein said piezoelectric sensor is operable up to a temperature of about 1200° C.
3 more elements
A high temperature piezoelectric sensor device comprising:
- first and second electrodes;
- a piezoelectric film starting said first and second electrodes
- first and second insulator plates, said first insulator being coupled to said first electrode,
- a housing coupled between said first and second insulator plates;
- and
- a mass member having exterior and interior portions, said housing enclosing said interior portion of said mass member and said second insulator plate member,
- wherein said first and second insulator plates, said first and second electrodes, said piezoelectric film, and said housing define a cavity, and said exterior portion of said mass member is coupled to said second electrode through said cavity.
4 more elements
A high temperature piezoelectric sensor suitable for use in a control circuit comprising:
- a sensor;
- a charge amplifier that is electronically coupled to said sensor;
- and a microelectronic device that is electronically coupled to said charge amplifier;
- wherein said sensor comprises:
- first and second electrodes;
- a first insulator having first and second surfaces;
- a pressure component engaging at leant said first surface of said first insulator, wherein said second surface of said first insulator engages said first electrode, and said pressure component is coupled to said second electrode;
- a second insulator extending substantially perpendicular from said second electrode;
- and
- a piezoelectric film separating said first and said second electrode, wherein said piezoelectric film is deposited using chemical vapor deposition, wherein said piezoelectric sensor is operable up to a temperature of about 1200° C.
7 more elements
A high temperature piezoelectric sensor suited for measuring force comprising:
- a first electrode having a first side and a second side;
- a piezoelectric aluminum nitride film provided to said second aids of said first electrode;
- a second electrode having a first side and a second side, wherein said piezoelectric aluminum nitride film is coupled to said second side of said second electrode;
- an insulating plate provided to said first side of said first electrode;
- an insulator provided to said second side of said second electrode said insulator protrudes from said second electrode in a manner that cause said insulator to fit perpendicularly against said first electrode and said piezoelectric aluminum nitride film;
- a top pressure plate coupled to said insulating plate, said top pressure plate expands over said insulating plate and slidably mounts between said insulator and said second electrode;
- a connector,
- a first wire connecting said first electrode to said connector, and
- a jumper wire connecting said second electrode to said pressure plate.
6 more elements
Dependencies are inferred from the claim text.